Microstructure and mechanical properties of nanostructured Ti-Si-N coatings.

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We have synthesized a series of Ti-Si-N coatings with 0 to 20 at. % Si by high-density plasma-assisted vapor-phase deposition. Composition, structure, and atomic short-range order were characterized by Rutherford Backscattering Spectrometry (RBS), Transmission Electron Microscopy (TEM), {Theta}-2{Theta} X-ray Diffraction (XRD), and X-ray Absorption Near Edge Structure (XANES) spectroscopy. The mechanical properties of these coatings were characterized by instrumented nanoindentation, and compared to those of B1-TiN. Our experiments show that the present series of Ti-Si-N coatings are nanocomposites, consisting of a nm-scale mixture of crystalline titanium nitride (TiN) and amorphous silicon nitride (a-Si:N). The mechanical response of the present series ... continued below

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29 pages

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Meng, W.J.; Zhang, X.D.; Shi, B.; Jiang, J.C.; Rehn, L.E.; Baldo, P.M. et al. April 18, 2002.

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We have synthesized a series of Ti-Si-N coatings with 0 to 20 at. % Si by high-density plasma-assisted vapor-phase deposition. Composition, structure, and atomic short-range order were characterized by Rutherford Backscattering Spectrometry (RBS), Transmission Electron Microscopy (TEM), {Theta}-2{Theta} X-ray Diffraction (XRD), and X-ray Absorption Near Edge Structure (XANES) spectroscopy. The mechanical properties of these coatings were characterized by instrumented nanoindentation, and compared to those of B1-TiN. Our experiments show that the present series of Ti-Si-N coatings are nanocomposites, consisting of a nm-scale mixture of crystalline titanium nitride (TiN) and amorphous silicon nitride (a-Si:N). The mechanical response of the present series of Ti-Si-N coatings was found to be essentially independent of the Si composition, and similar to that of B1-TiN.

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29 pages

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  • International Conference on Metallurgical Coatings and Thin Films (ICMCTF 2002), San Diego, CA (US), 04/22/2002--04/26/2002

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  • Report No.: ANL/MSD/CP-107365
  • Grant Number: W-31-109-ENG-38
  • Office of Scientific & Technical Information Report Number: 793903
  • Archival Resource Key: ark:/67531/metadc742719

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  • April 18, 2002

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  • Oct. 19, 2015, 7:39 p.m.

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  • March 25, 2016, 12:30 p.m.

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Meng, W.J.; Zhang, X.D.; Shi, B.; Jiang, J.C.; Rehn, L.E.; Baldo, P.M. et al. Microstructure and mechanical properties of nanostructured Ti-Si-N coatings., article, April 18, 2002; Illinois. (digital.library.unt.edu/ark:/67531/metadc742719/: accessed August 21, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.