Energy performance of cleanroom environmental systems

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Description

By developing metrics for evaluating cleanroom air system performance and overall load intensity, this paper provides energy benchmarking results for thirteen cleanroom environmental system performance, and identifies opportunities for improving cleanroom energy efficiency while maintaining or improving cleanroom contamination control. Comparisons with IEST Recommended Practice are made to examine the performance of cleanroom air systems. These results can serve as a vehicle to identify energy efficient cleanroom design practices and to highlight important issues in cleanroom operation and maintenance. Results from this study confirm that there are opportunities in improving energy efficiency of cleanroom environmental systems while maintaining effective contamination ... continued below

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12 pages

Creation Information

Xu, Tengfang & Tschudi, William F. November 1, 2001.

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This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. More information about this article can be viewed below.

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Description

By developing metrics for evaluating cleanroom air system performance and overall load intensity, this paper provides energy benchmarking results for thirteen cleanroom environmental system performance, and identifies opportunities for improving cleanroom energy efficiency while maintaining or improving cleanroom contamination control. Comparisons with IEST Recommended Practice are made to examine the performance of cleanroom air systems. These results can serve as a vehicle to identify energy efficient cleanroom design practices and to highlight important issues in cleanroom operation and maintenance. Results from this study confirm that there are opportunities in improving energy efficiency of cleanroom environmental systems while maintaining effective contamination control.

Physical Description

12 pages

Notes

OSTI as DE00793761

Source

  • Institute of Environmental Science and Technology (IEST) 48th Annual Technical Meeting, Anaheim, CA (US), 04/28/2002--05/01/2002

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  • Report No.: LBNL--49106
  • Report No.: HT-438
  • Grant Number: AC03-76SF00098
  • Office of Scientific & Technical Information Report Number: 793761
  • Archival Resource Key: ark:/67531/metadc742410

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Creation Date

  • November 1, 2001

Added to The UNT Digital Library

  • Oct. 19, 2015, 7:39 p.m.

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  • April 4, 2016, 6:37 p.m.

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Xu, Tengfang & Tschudi, William F. Energy performance of cleanroom environmental systems, article, November 1, 2001; California. (digital.library.unt.edu/ark:/67531/metadc742410/: accessed August 20, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.