Soft x-ray scanning microtomography with submicron resolution

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Description

Scanning soft x-ray microtomography was used to obtain high-resolution three-dimensional images of a microfabricated test object. Using a special rotation stage mounted on the scanning transmission x-ray microscope at the XIA Beamline at the National Synchrotron Light Source, we recorded nine two-dimensional projections of the 3D test object over an angular range of {minus}50{degrees} to +55{degrees}. The x-ray wavelength was 3.6 nm and the radiation dose to the object per projection was approximately 2 {times} 10{sup 6} Gy. The object consisted of two gold patterns supported on transparent silicon nitride membranes, separated by 4.75 Jim, with 100 to 300-nm wide ... continued below

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11 p.

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McNulty, I.; Haddad, W.S.; Trebes, J.E. & Anderson, E.H. December 31, 1994.

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Description

Scanning soft x-ray microtomography was used to obtain high-resolution three-dimensional images of a microfabricated test object. Using a special rotation stage mounted on the scanning transmission x-ray microscope at the XIA Beamline at the National Synchrotron Light Source, we recorded nine two-dimensional projections of the 3D test object over an angular range of {minus}50{degrees} to +55{degrees}. The x-ray wavelength was 3.6 nm and the radiation dose to the object per projection was approximately 2 {times} 10{sup 6} Gy. The object consisted of two gold patterns supported on transparent silicon nitride membranes, separated by 4.75 Jim, with 100 to 300-nm wide and 65-nm thick features. We reconstructed a volumetric data set of the test object from the two-dimensional projections using an algebraic reconstruction technique algorithm. Features of the test object were resolved to {approximately}100 nm in transverse and longitudinal extent in three-dimensional images rendered from the volumetric set.

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11 p.

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INIS; OSTI as DE95011817

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  • 5. international meeting on synchrotron radiation instrumentation, Stony Brook, NY (United States), 18-22 Jul 1994

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  • Other: DE95011817
  • Report No.: ANL/XFD/CP--82883
  • Report No.: CONF-940714--55
  • Grant Number: AC03-76SF00098;W-31-109-ENG-38;W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 80347
  • Archival Resource Key: ark:/67531/metadc742053

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  • December 31, 1994

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  • Oct. 19, 2015, 7:39 p.m.

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  • Dec. 11, 2015, 5:11 p.m.

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McNulty, I.; Haddad, W.S.; Trebes, J.E. & Anderson, E.H. Soft x-ray scanning microtomography with submicron resolution, article, December 31, 1994; Illinois. (digital.library.unt.edu/ark:/67531/metadc742053/: accessed September 22, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.