Estimation of the electron beam energy spread for TEM information limit

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Description

Sub-Angstrom TEM of materials requires focal-series reconstruction (FSR) or electron holography to retrieve the electron wave at the specimen exit-surface to very high resolution. As a consequence, we need to measure the microscope information limit. With a sub-Angstrom information limit, the one-Angstrom microscope (OAM) project at the NCEM has achieved sub-Angstrom resolution by FSR. We present a new method of estimating the information limit of the microscope, based on energy-spread measurements with an image filter.

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O'Keefe, Michael A.; Tiemeijer, Peter C. & Sidorov, Maxim V. February 20, 2002.

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Sub-Angstrom TEM of materials requires focal-series reconstruction (FSR) or electron holography to retrieve the electron wave at the specimen exit-surface to very high resolution. As a consequence, we need to measure the microscope information limit. With a sub-Angstrom information limit, the one-Angstrom microscope (OAM) project at the NCEM has achieved sub-Angstrom resolution by FSR. We present a new method of estimating the information limit of the microscope, based on energy-spread measurements with an image filter.

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vp.; OS: Windows

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OSTI as DE00796094

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  • Microscopy and Microanalysis 2002, Quebec City (CA), 08/04/2002--08/08/2002

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  • Report No.: LBNL--49641
  • Grant Number: AC03-76SF00098
  • Office of Scientific & Technical Information Report Number: 796094
  • Archival Resource Key: ark:/67531/metadc741428

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  • February 20, 2002

Added to The UNT Digital Library

  • Oct. 19, 2015, 7:39 p.m.

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  • April 4, 2016, 5:55 p.m.

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O'Keefe, Michael A.; Tiemeijer, Peter C. & Sidorov, Maxim V. Estimation of the electron beam energy spread for TEM information limit, article, February 20, 2002; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc741428/: accessed September 24, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.