SLOPE PROFILOMETRY OF GRAZING INCIDENCE OPTICS.

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Description

Profiling instruments are well-suited to the measurement of grazing incidence optics, such as those found in synchrotron radiation beam lines. Slope measuring profilers, based upon the principle of the pencil beam interferometer, have proven to be especially useful in measuring the figure and slope errors on cylindrical aspheres. The Long Trace Profiler, in various configurations, is the most widely used of this class of profiler. Current performance provides slope measurement accuracy at the microradian level and height measurements accurate to 25 nm over 1 meter trace lengths.

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8 pages

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TAKACS,P.Z. January 14, 2003.

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Description

Profiling instruments are well-suited to the measurement of grazing incidence optics, such as those found in synchrotron radiation beam lines. Slope measuring profilers, based upon the principle of the pencil beam interferometer, have proven to be especially useful in measuring the figure and slope errors on cylindrical aspheres. The Long Trace Profiler, in various configurations, is the most widely used of this class of profiler. Current performance provides slope measurement accuracy at the microradian level and height measurements accurate to 25 nm over 1 meter trace lengths.

Physical Description

8 pages

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  • INTERNATIONAL WORKSHOP ON EXTREME OPTICS AND SENSORS, IKEBURUKO, TOKYO (JP), 01/14/2003--01/17/2003

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  • Report No.: BNL--69546
  • Grant Number: AC02-98CH10886
  • Office of Scientific & Technical Information Report Number: 809969
  • Archival Resource Key: ark:/67531/metadc739779

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

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  • January 14, 2003

Added to The UNT Digital Library

  • Oct. 18, 2015, 6:40 p.m.

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  • Nov. 7, 2016, 3:46 p.m.

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TAKACS,P.Z. SLOPE PROFILOMETRY OF GRAZING INCIDENCE OPTICS., article, January 14, 2003; Upton, New York. (digital.library.unt.edu/ark:/67531/metadc739779/: accessed December 11, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.