INCREASING THE FRACTURE TOUGHNESS OF SILICON BY ION IMPLANTATION. Page: 1 of 13
This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided to UNT Digital Library by the UNT Libraries Government Documents Department.
Extracted Text
The following text was automatically extracted from the image on this page using optical character recognition software:
LA-U R-02-5516
Approved for public release;
distribution is unlimited.Title:
Author(s):
Submitted to:Increasing the fracture toughness of silicon by
ion implantation
J. G. Swadener and M. Nastasi
http://lib-www. lanl.gov/cgi-bin/getfile?00852051. pdfLos Alamos National Laboratory, an affirmative action/equal opportunity employer, is operated by the University of California for the U.S. Department of
Energy under contract W-7405-ENG-36. By acceptance of this article, the publisher recognizes that the U.S. Government retains a nonexclusive, royalty-
free license to publish or reproduce the published form of this contribution, or to allow others to do so, for U.S. Government purposes. Los Alamos National
Laboratory requests that the publisher identify this article as work performed under the auspices of the U.S. Department of Energy. Los Alamos National
Laboratory strongly supports academic freedom and a researcher's right to publish; as an institution, however, the Laboratory does not endorse the
viewpoint of a publication or guarantee its technical correctness.
FORM 836 (10/96)
Upcoming Pages
Here’s what’s next.
Search Inside
This article can be searched. Note: Results may vary based on the legibility of text within the document.
Tools / Downloads
Get a copy of this page or view the extracted text.
Citing and Sharing
Basic information for referencing this web page. We also provide extended guidance on usage rights, references, copying or embedding.
Reference the current page of this Article.
Swadener, John G. & Nastasi, Michael. INCREASING THE FRACTURE TOUGHNESS OF SILICON BY ION IMPLANTATION., article, August 30, 2002; New Mexico. (https://digital.library.unt.edu/ark:/67531/metadc739650/m1/1/: accessed April 2, 2024), University of North Texas Libraries, UNT Digital Library, https://digital.library.unt.edu; crediting UNT Libraries Government Documents Department.