Bias and self-bias of magnetic macroparticle filters for cathodic arc plasmas

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Curved magnetic filters are often used for the removal of macroparticles from cathodic arc plasmas. This study addresses the need to further reduce losses and improving plasma throughput. The central figure of merit is the system coefficient Kappa defined as filtered ion current normalized by the plasma-producing arc current. The coefficient Kappa is investigated as a function of DC and pulsed magnetic field operation, magnetic field strength, external electric bias, and arc amplitude. It increases with positive filter bias but saturates at about 15 V for relatively low magnetic field ({approx}10 mT), whereas stronger magnetic fields lead to higher Kappa ... continued below

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Byon, Eungsun & Anders, Andre December 1, 2002.

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Curved magnetic filters are often used for the removal of macroparticles from cathodic arc plasmas. This study addresses the need to further reduce losses and improving plasma throughput. The central figure of merit is the system coefficient Kappa defined as filtered ion current normalized by the plasma-producing arc current. The coefficient Kappa is investigated as a function of DC and pulsed magnetic field operation, magnetic field strength, external electric bias, and arc amplitude. It increases with positive filter bias but saturates at about 15 V for relatively low magnetic field ({approx}10 mT), whereas stronger magnetic fields lead to higher Kappa with saturation at about 25 V. Further increase of positive bias reduces Kappa. These findings are true for both pulsed and DC filters. Bias of pulsed filters has been realized using the voltage drop across a self-bias resistor, eliminating the need for a separate bias circuit. Almost 100 A of filtered copper ions have been obtained in pulse d mode, corresponding to Kappa approximately equal to 0.04. The results are interpreted by a simplified potential trough model.

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  • Journal Name: Journal of Applied Physics; Journal Volume: 93; Journal Issue: 12; Other Information: Journal Publication Date: June 15, 2003

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  • Report No.: LBNL--51790
  • Report No.: OM-474
  • Grant Number: AC03-76SF00098
  • Office of Scientific & Technical Information Report Number: 809923
  • Archival Resource Key: ark:/67531/metadc739553

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • December 1, 2002

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  • Oct. 18, 2015, 6:40 p.m.

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  • Dec. 1, 2017, 9:40 p.m.

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Byon, Eungsun & Anders, Andre. Bias and self-bias of magnetic macroparticle filters for cathodic arc plasmas, article, December 1, 2002; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc739553/: accessed December 12, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.