Enhanced adhesion for LIGA microfabrication by using a buffer layer

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Description

The present invention is an improvement on the LIGA microfabrication process wherein a buffer layer is applied to the upper or working surface of a substrate prior to the placement of a resist onto the surface of the substrate. The buffer layer is made from an inert low-Z material (low atomic weight), a material that absorbs secondary X-rays emissions from the substrate that are generated from the substrate upon exposure to a primary X-rays source. Suitable materials for the buffer layer include polyamides and polyimide. The preferred polyimide is synthesized from pyromellitic anhydride and oxydianiline (PMDA-ODA).

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Creation Information

Bajikar, Sateesh S.; DeCarlo, Francesco & Song, Joshua J. May 22, 1998.

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Description

The present invention is an improvement on the LIGA microfabrication process wherein a buffer layer is applied to the upper or working surface of a substrate prior to the placement of a resist onto the surface of the substrate. The buffer layer is made from an inert low-Z material (low atomic weight), a material that absorbs secondary X-rays emissions from the substrate that are generated from the substrate upon exposure to a primary X-rays source. Suitable materials for the buffer layer include polyamides and polyimide. The preferred polyimide is synthesized from pyromellitic anhydride and oxydianiline (PMDA-ODA).

Physical Description

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Notes

OSTI as DE00807999

Source

  • Patent File Date: 1998 May 22

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  • Report No.: PATENTS-US--A9110738
  • Grant Number: W-31109-ENG-38
  • Office of Scientific & Technical Information Report Number: 807999
  • Archival Resource Key: ark:/67531/metadc739340

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Office of Scientific & Technical Information Technical Reports

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Creation Date

  • May 22, 1998

Added to The UNT Digital Library

  • Oct. 18, 2015, 6:40 p.m.

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  • March 21, 2016, 1:55 p.m.

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Bajikar, Sateesh S.; DeCarlo, Francesco & Song, Joshua J. Enhanced adhesion for LIGA microfabrication by using a buffer layer, patent, May 22, 1998; Illinois. (digital.library.unt.edu/ark:/67531/metadc739340/: accessed November 18, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.