Non-additive sputtering of niobium and tantalum as large neutral and ion clusters.

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An analysis of available literature data on both the positive ion emission from Nb and Ta bombarded by 6 keV/atom Au{sub m}{sup -} atomic and molecular ions (m=1, 2, 3) and positive ionization probabilities of Nb{sub n} and Ta{sub n} neutral clusters sputtered from the same metals by 5 keV Ar{sup +} ions have been conducted. Dependencies of cluster yields Y{sub n,m} (regardless of a charge state) on number of atoms n in a sputtered particle were found to follow a power law as Y{sub n,m} {approx} n{sup -{sigma}{sub m}} where {sigma}{sub m} decreased with an increase of m. A ... continued below

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16 pages

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Belykh, S. F.; Palitsin, V. V.; Veryovkin, I. V.; Adriaens, A. & Adams, F. September 23, 2002.

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An analysis of available literature data on both the positive ion emission from Nb and Ta bombarded by 6 keV/atom Au{sub m}{sup -} atomic and molecular ions (m=1, 2, 3) and positive ionization probabilities of Nb{sub n} and Ta{sub n} neutral clusters sputtered from the same metals by 5 keV Ar{sup +} ions have been conducted. Dependencies of cluster yields Y{sub n,m} (regardless of a charge state) on number of atoms n in a sputtered particle were found to follow a power law as Y{sub n,m} {approx} n{sup -{sigma}{sub m}} where {sigma}{sub m} decreased with an increase of m. A non-linear enhancement of yields for large Nb{sub n}{sup +} and Ta{sub n}{sup +} cluster ions (n>4) appeared to be due to a non-additive process of sputtering rather than because of a non-additive process of their ionization. A manifestation of the non-additive sputtering in kinetic energy distributions of secondary ions found to be different for atomic and cluster ions.

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16 pages

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  • 14th International Workshop on Inelastic Ion-Surface Collisions, Ameland (NL), 09/08/2002--09/13/2002

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  • Report No.: ANL/MSD/CP-108713
  • Grant Number: W-31-109-ENG-38
  • Office of Scientific & Technical Information Report Number: 801620
  • Archival Resource Key: ark:/67531/metadc737013

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  • September 23, 2002

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  • Oct. 19, 2015, 7:39 p.m.

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  • March 22, 2016, 9:40 p.m.

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Belykh, S. F.; Palitsin, V. V.; Veryovkin, I. V.; Adriaens, A. & Adams, F. Non-additive sputtering of niobium and tantalum as large neutral and ion clusters., article, September 23, 2002; Illinois. (digital.library.unt.edu/ark:/67531/metadc737013/: accessed August 20, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.