Analytical and numerical modeling of surface morphologies in thin films Metadata

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Title

  • Main Title Analytical and numerical modeling of surface morphologies in thin films

Creator

  • Author: Genin, F. Y.
    Creator Type: Personal

Contributor

  • Sponsor: United States. Department of Energy.
    Contributor Type: Organization
    Contributor Info: USDOE, Washington, DC (United States)

Publisher

  • Name: Lawrence Livermore National Laboratory
    Place of Publication: California
    Additional Info: Lawrence Livermore National Lab., CA (United States)

Date

  • Creation: 1995-05

Language

  • English

Description

  • Content Description: Experimental studies have show that strains due to thermal expansion mismatch between a film and its substrate can produce very large stresses in the film that can lead to the formation of holes and hillocks. Based on a phenomenological description of the evolution of a solid surface under both capillary and stress driving forces and for surface and grain boundary self-diffusion, this article provides analytical and numerical solutions for surface profiles of model geometries in polycrystalline thin films. Results can explain a variety of surface morphologies commonly observed experimentally and are discussed to give some practical insights on how to control the growth of holes and hillocks in thin films.
  • Physical Description: 12 p.

Subject

  • Keyword: Surfaces
  • Keyword: Self-Diffusion
  • STI Subject Categories: 36 Materials Science
  • Keyword: Thin Films
  • Keyword: Grain Boundaries
  • Keyword: Morphology

Source

  • Conference: Spring meeting of the Materials Research Society (MRS), San Francisco, CA (United States), 17-21 Apr 1995

Collection

  • Name: Office of Scientific & Technical Information Technical Reports
    Code: OSTI

Institution

  • Name: UNT Libraries Government Documents Department
    Code: UNTGD

Resource Type

  • Article

Format

  • Text

Identifier

  • Other: DE95014453
  • Report No.: UCRL-JC--120324
  • Report No.: CONF-950412--18
  • Grant Number: W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 80732
  • Archival Resource Key: ark:/67531/metadc736884

Note

  • Display Note: OSTI as DE95014453
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