Analytical and numerical modeling of surface morphologies in thin films

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Experimental studies have show that strains due to thermal expansion mismatch between a film and its substrate can produce very large stresses in the film that can lead to the formation of holes and hillocks. Based on a phenomenological description of the evolution of a solid surface under both capillary and stress driving forces and for surface and grain boundary self-diffusion, this article provides analytical and numerical solutions for surface profiles of model geometries in polycrystalline thin films. Results can explain a variety of surface morphologies commonly observed experimentally and are discussed to give some practical insights on how to ... continued below

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12 p.

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Genin, F. Y. May 1995.

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Description

Experimental studies have show that strains due to thermal expansion mismatch between a film and its substrate can produce very large stresses in the film that can lead to the formation of holes and hillocks. Based on a phenomenological description of the evolution of a solid surface under both capillary and stress driving forces and for surface and grain boundary self-diffusion, this article provides analytical and numerical solutions for surface profiles of model geometries in polycrystalline thin films. Results can explain a variety of surface morphologies commonly observed experimentally and are discussed to give some practical insights on how to control the growth of holes and hillocks in thin films.

Physical Description

12 p.

Notes

OSTI as DE95014453

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  • Spring meeting of the Materials Research Society (MRS), San Francisco, CA (United States), 17-21 Apr 1995

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  • Other: DE95014453
  • Report No.: UCRL-JC--120324
  • Report No.: CONF-950412--18
  • Grant Number: W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 80732
  • Archival Resource Key: ark:/67531/metadc736884

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Office of Scientific & Technical Information Technical Reports

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  • May 1995

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  • Oct. 18, 2015, 6:40 p.m.

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  • Feb. 16, 2016, 1:40 p.m.

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Genin, F. Y. Analytical and numerical modeling of surface morphologies in thin films, article, May 1995; California. (digital.library.unt.edu/ark:/67531/metadc736884/: accessed May 24, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.