Microfabrication of freestanding metal structures released from graphite substrates.

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Description

A sacrificial layer is usually used to release electroformed microstructures. Because of the chemistry applied to the sacrificial layer, only a limited number of metals can be used for electroforming. A novel method to fabricate freestanding electroformed copper structures is presented. A graphite substrate allows the release of the metal part, by abrasive removal of the graphite after electroforming. Results on fabrication of high-aspect-ratio freestanding copper grids are presented; these can be used as x-ray collimator in medical imaging to reduce scattered radiation. This process has potential application to the fabrication of injection molds and microparts on pick-and-place carriers for ... continued below

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3 pages

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Makarova, O. V.; Tang, C.-M.; Mancini, D. C.; Moldovan, N.; Divan, R.; Ryding, D. G. et al. February 22, 2002.

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Description

A sacrificial layer is usually used to release electroformed microstructures. Because of the chemistry applied to the sacrificial layer, only a limited number of metals can be used for electroforming. A novel method to fabricate freestanding electroformed copper structures is presented. A graphite substrate allows the release of the metal part, by abrasive removal of the graphite after electroforming. Results on fabrication of high-aspect-ratio freestanding copper grids are presented; these can be used as x-ray collimator in medical imaging to reduce scattered radiation. This process has potential application to the fabrication of injection molds and microparts on pick-and-place carriers for microelectromechanical systems (MEMS).

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3 pages

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  • 15th IEEE International Micro Electro Mechanical Systems Conference (MEMS 2002), Las Vegas, NV (US), 01/20/2002--01/24/2002

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  • Report No.: ANL/XFD/CP-105749
  • Grant Number: W-31-109-ENG-38
  • Office of Scientific & Technical Information Report Number: 792133
  • Archival Resource Key: ark:/67531/metadc736611

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

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  • February 22, 2002

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  • Oct. 19, 2015, 7:39 p.m.

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  • March 22, 2016, 5:39 p.m.

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Makarova, O. V.; Tang, C.-M.; Mancini, D. C.; Moldovan, N.; Divan, R.; Ryding, D. G. et al. Microfabrication of freestanding metal structures released from graphite substrates., article, February 22, 2002; Illinois. (digital.library.unt.edu/ark:/67531/metadc736611/: accessed October 18, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.