Preparations for EUV interferometry of the 0.3 NA MET optic

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Description

An at-wavelength interferometer is being created for the measurement and alignment of the 0.3 numerical aperture Micro Exposure Tool projection optic at EUV wavelengths. The prototype MET system promises to provide early learning from EUV lithographic imaging down to 20-nm feature size. The threefold increase to 0.3 NA in the image-side numerical aperture presents several challenges for the extension of ultra-high-accuracy interferometry, including pinhole fabrication and the calibration and removal of systematic error sources.

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16 pages

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Goldberg, Kenneth A.; Naulleau, Patrick P.; Denham, Paul E.; Rekawa, Senajith B.; Jackson, Keith H.; Liddle, J. Alexander et al. October 30, 2003.

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Description

An at-wavelength interferometer is being created for the measurement and alignment of the 0.3 numerical aperture Micro Exposure Tool projection optic at EUV wavelengths. The prototype MET system promises to provide early learning from EUV lithographic imaging down to 20-nm feature size. The threefold increase to 0.3 NA in the image-side numerical aperture presents several challenges for the extension of ultra-high-accuracy interferometry, including pinhole fabrication and the calibration and removal of systematic error sources.

Physical Description

16 pages

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OSTI as DE00819978

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  • EIPBN 2003, Tampa, FL (US), 05/27/2003--05/30/2003

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  • Report No.: LBNL--54007
  • Grant Number: AC03-76SF00098
  • Office of Scientific & Technical Information Report Number: 819978
  • Archival Resource Key: ark:/67531/metadc736549

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  • October 30, 2003

Added to The UNT Digital Library

  • Oct. 18, 2015, 6:40 p.m.

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  • April 4, 2016, 2:08 p.m.

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Goldberg, Kenneth A.; Naulleau, Patrick P.; Denham, Paul E.; Rekawa, Senajith B.; Jackson, Keith H.; Liddle, J. Alexander et al. Preparations for EUV interferometry of the 0.3 NA MET optic, article, October 30, 2003; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc736549/: accessed September 24, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.