Strain and Texture in Al-Interconnect Wires Measured by X-Ray Microbeam Diffraction

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The local strain and texture in Al interconnect wires have been investigated using white and monochromatic x-ray microbeams on the MHATTCAT undulator beam line at the Advanced Photon Source. Intergrain and intragrain orientations were obtained with ~0.01 degree sensitivity using white beam measurements on wide Al pads (~100 Mu-m) and thin (2 Mu-m) Al wires. Orientation changes of up to 1 degree were found within individual grains of the (111) textured Al interconnects. Deviatoric strain measurements indicate small intragranular strain variations, but intergranular strain variations were found to be quite large.

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6 pages

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Budai, J. D.; Chung, J.-S.; Ice, G. E.; Larson, B. C.; Lowe, W. P.; Tamura, N. et al. April 5, 1999.

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Description

The local strain and texture in Al interconnect wires have been investigated using white and monochromatic x-ray microbeams on the MHATTCAT undulator beam line at the Advanced Photon Source. Intergrain and intragrain orientations were obtained with ~0.01 degree sensitivity using white beam measurements on wide Al pads (~100 Mu-m) and thin (2 Mu-m) Al wires. Orientation changes of up to 1 degree were found within individual grains of the (111) textured Al interconnects. Deviatoric strain measurements indicate small intragranular strain variations, but intergranular strain variations were found to be quite large.

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6 pages

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  • Spring Meeting of the Materials Research Society, San Francisco, CA, April 5-9, 1999

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  • Other: DE00007925
  • Report No.: ORNL/CP-103187
  • Grant Number: AC05-96OR22464
  • Office of Scientific & Technical Information Report Number: 7925
  • Archival Resource Key: ark:/67531/metadc736499

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  • April 5, 1999

Added to The UNT Digital Library

  • Oct. 19, 2015, 7:39 p.m.

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  • April 9, 2018, 7:24 p.m.

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Budai, J. D.; Chung, J.-S.; Ice, G. E.; Larson, B. C.; Lowe, W. P.; Tamura, N. et al. Strain and Texture in Al-Interconnect Wires Measured by X-Ray Microbeam Diffraction, article, April 5, 1999; Warrendale, Pennsylvania. (digital.library.unt.edu/ark:/67531/metadc736499/: accessed December 18, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.