Macro stress mapping on thin film buckling

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Thin films deposited by Physical Vapour Deposition techniques on substrates generally exhibit large residual stresses which may be responsible of thin film buckling in the case of compressive stresses. Since the 80's, a lot of theoretical work has been done to develop mechanical models but only a few experimental work has been done on this subject to support these theoretical approaches and nothing concerning local stress measurement mainly because of the small dimension of the buckling (few 10th mm). This paper deals with the application of micro beam X-ray diffraction available on synchrotron radiation sources for stress mapping analysis of ... continued below

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Goudeau, P.; Villain, P.; Renault, P.-O.; Tamura, N.; Celestre, R.S. & Padmore, H.A. November 6, 2002.

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Description

Thin films deposited by Physical Vapour Deposition techniques on substrates generally exhibit large residual stresses which may be responsible of thin film buckling in the case of compressive stresses. Since the 80's, a lot of theoretical work has been done to develop mechanical models but only a few experimental work has been done on this subject to support these theoretical approaches and nothing concerning local stress measurement mainly because of the small dimension of the buckling (few 10th mm). This paper deals with the application of micro beam X-ray diffraction available on synchrotron radiation sources for stress mapping analysis of gold thin film buckling.

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vp.

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INIS; OSTI as DE00807428

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  • 6th European Conference on Residual Stresses, Coimbra (PT), 07/10/2002--07/13/2002

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  • Report No.: LBNL--51711
  • Grant Number: AC03-76SF00098
  • Office of Scientific & Technical Information Report Number: 807428
  • Archival Resource Key: ark:/67531/metadc735989

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

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  • November 6, 2002

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  • Oct. 18, 2015, 6:40 p.m.

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  • April 4, 2016, 5:57 p.m.

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Goudeau, P.; Villain, P.; Renault, P.-O.; Tamura, N.; Celestre, R.S. & Padmore, H.A. Macro stress mapping on thin film buckling, article, November 6, 2002; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc735989/: accessed November 22, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.