Oblique ion texturing of yttria-stabilized zirconia: The {l_brace}211{r_brace}<111> structure

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Amorphous (Zr,Y)O{sub x} films were synthesized by reactive magnetron sputtering and subsequently crystallized by oblique ion bombardment. Crystalline texture nucleated by the ion beam was replicated by solid-phase epitaxial growth throughout the formerly amorphous yttria-stabilized zirconia (YSZ) film. The resulting YSZ films have (211) orientation normal to the substrate with in-plane directions (111), parallel, and (110), transverse, to the azimuth of the ion beam. We hypothesize that the texture mechanism involves ion-induced film compression and shear. The results, taken together with prior work, show that oblique ion texturing of amorphous films is a general phenomenon that can be used to ... continued below

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page(s) 343-345

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Berdahl, Paul; Reade, Ronald P.; Liu, Jinping; Russo, Richard E.; Fritzemeier, Les; Buczek, David et al. July 1, 2002.

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Amorphous (Zr,Y)O{sub x} films were synthesized by reactive magnetron sputtering and subsequently crystallized by oblique ion bombardment. Crystalline texture nucleated by the ion beam was replicated by solid-phase epitaxial growth throughout the formerly amorphous yttria-stabilized zirconia (YSZ) film. The resulting YSZ films have (211) orientation normal to the substrate with in-plane directions (111), parallel, and (110), transverse, to the azimuth of the ion beam. We hypothesize that the texture mechanism involves ion-induced film compression and shear. The results, taken together with prior work, show that oblique ion texturing of amorphous films is a general phenomenon that can be used to fabricate substrates with more than one type of crystallographic orientation.

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page(s) 343-345

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  • Journal Name: Applied Physics Letters; Journal Volume: 82; Journal Issue: 3; Other Information: Journal Publication Date: 01/20/2003

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  • Report No.: LBNL--51802
  • Grant Number: AC03-76SF00098
  • Office of Scientific & Technical Information Report Number: 808934
  • Archival Resource Key: ark:/67531/metadc735510

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  • July 1, 2002

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  • Oct. 18, 2015, 6:40 p.m.

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Berdahl, Paul; Reade, Ronald P.; Liu, Jinping; Russo, Richard E.; Fritzemeier, Les; Buczek, David et al. Oblique ion texturing of yttria-stabilized zirconia: The {l_brace}211{r_brace}<111> structure, article, July 1, 2002; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc735510/: accessed September 24, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.