Mini RF-driven ion source for focused ion beam system

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Description

Mini RF-driven ion sources with 1.2 cm and 1.5 cm inner chamber diameter have been developed at Lawrence Berkeley National Laboratory. Several gas species have been tested including argon, krypton and hydrogen. These mini ion sources operate in inductively coupled mode and are capable of generating high current density ion beams at tens of watts. Since the plasma potential is relatively low in the plasma chamber, these mini ion sources can function reliably without any perceptible sputtering damage. The mini RF-driven ion sources will be combined with electrostatic focusing columns, and are capable of producing nano focused ion beams for ... continued below

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10 pages

Creation Information

Jiang, X.; Ji, Q.; Chang, A. & Leung, K.N. August 2, 2002.

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This report is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. It has been viewed 11 times . More information about this report can be viewed below.

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Description

Mini RF-driven ion sources with 1.2 cm and 1.5 cm inner chamber diameter have been developed at Lawrence Berkeley National Laboratory. Several gas species have been tested including argon, krypton and hydrogen. These mini ion sources operate in inductively coupled mode and are capable of generating high current density ion beams at tens of watts. Since the plasma potential is relatively low in the plasma chamber, these mini ion sources can function reliably without any perceptible sputtering damage. The mini RF-driven ion sources will be combined with electrostatic focusing columns, and are capable of producing nano focused ion beams for micro machining and semiconductor fabrications.

Physical Description

10 pages

Notes

OSTI as DE00802041

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  • Other Information: PBD: 2 Aug 2002

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  • Report No.: LBNL--51251
  • Grant Number: AC03-76SF00098
  • DOI: 10.2172/802041 | External Link
  • Office of Scientific & Technical Information Report Number: 802041
  • Archival Resource Key: ark:/67531/metadc735163

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Office of Scientific & Technical Information Technical Reports

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  • August 2, 2002

Added to The UNT Digital Library

  • Oct. 19, 2015, 7:39 p.m.

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  • April 4, 2016, 3:27 p.m.

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Jiang, X.; Ji, Q.; Chang, A. & Leung, K.N. Mini RF-driven ion source for focused ion beam system, report, August 2, 2002; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc735163/: accessed August 19, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.