MEMS Adaptive Optics Devices: LDRD No. 02-1385 Summary Report Page: 3 of 31
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Printed December 2002
Reprinted January 2003
MEMS Adaptive Optics Devices: LDRD No. 02-1385
Daryl J. Dagel, James J. Allen, and Jeffrey L. Dohner
MEMS Device Technologies
Kent B. Pfeifer
Microsensors Science and Technology
Michael B. Sinclair
Microsystems Materials, Tribology and Technologies
Olga Blum Spahn
RF Microsystems Technologies
Christine M. Wehlburg
Chemical and Biological Sensing, Imaging and Analysis
Joseph C. Wehlburg
Remote Sensing and Exploitation
Sandia National Laboratories
P.O. Box 5800
Albuquerque, NM 87185-1080
This LDRD leverages the surface micromachining capability embodied in Sandia's Ultra-planar
Multi-level MEMS Technology (SUMMiTTM) to develop optical mirror arrays for spectroscopic
remote sensing systems. The research consists of two parts: (1) the development of a
programmable diffraction grating for use in a correlation spectrometer, and (2) the development
of a programmable mask for use in a hyperspectral imager. From a design perspective, these
efforts overlap considerably in terms of array geometry, layout, and optical tolerances and differ
mainly with regard to the degrees of freedom of the mirror elements. Similarities exist on a
functional level as well: both devices select a subset of the source spectrum for analysis. The first
device, referred to as the Polychromator, reproduces the characteristic spectra of substances by
changing the diffraction pattern reflected from its mirror array, while the second device, the
Hadamard Transform Spectral Imager (HTSI), identifies the spectra of objects by sampling the
different wavelength bands generated by a conventional grating.
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DAGEL, DARYL J. & ALLEN, JAMES J. MEMS Adaptive Optics Devices: LDRD No. 02-1385 Summary Report, report, December 1, 2002; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc734770/m1/3/: accessed June 19, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.