Final Report on LDRD Project: Heterogeneous Integration of Optoelectronic Arrays and Microelectronics Page: 3 of 97
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Printed February 2003
Final Report on LDRD Project: Heterogeneous Integration
of Optoelectronic Arrays and Microelectronics
Kent M. Geib, Darwin K. Serkland, Kent D. Choquette*, Gregory M. Peake,
Terry W. Hargett**, Jana J. Hindi***, Victoria M. Montano**, Gary D. Karpen,
Ronald D. Briggs, G. Ronald Hadley, Sayan D. Mukherjee*, Charles T. Sullivan
RF Microsystems Technologies
Andrew A. Allerman
Chemical Processing Science
Sally Samora** and Tony R. Carter**
Photonic Microsystems Technologies
Dennis J. Rieger
Arthur J. Fischer
Semiconductor Material & Device Science
Vincent M. Hietala
Sandia National Laboratories
P.O. Box 5800
Albuquerque, NM 87185-0603
Integrated microsystems provide the benefits of small size, low power consumption,
robustness, and potentially inexpensive manufacture. However, multifunctional
advanced microsystems often require a combination of microelectronic and photonic
technologies. For example, high-density 2-dimensional integrated optoelectronic arrays
are the basic components necessary to construct real-time electro-optical signal
processing and analog information processing microsystems. In corresponding
*no longer at Sandia **L&M Technologies, Inc.
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GEIB, KENT M.; SERKLAND, DARWIN K.; CHOQUETTE, K.D.; ALLERMAN, ANDREW A.; PEAKE, GREGORY M.; HARGETT, TERRY et al. Final Report on LDRD Project: Heterogeneous Integration of Optoelectronic Arrays and Microelectronics, report, February 1, 2003; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc734637/m1/3/: accessed November 18, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.