Final Project Report for Grant DE-FG03-00ER54581 Selective Control of Chemical Reactions With Plasmas

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OAK-B135 This research work focused on control of the reactive species inside a plasma through measurement and manipulation of the electron energy distribution function (EEDF) and on understanding the surface reaction mechanisms on the substrate exposed to a combination of ion and atom beam sources to simulate a real plasma. A GEC chamber (Gaseous Electronic Conference Reference Cell)8 with a mass spectrometer and a Langmuir probe (LP) system were used for this research. It was found that H2 and N2 additives to an Ar plasma could effectively change the EEDF and the average electron temperature (Te). This finding provides the ... continued below

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315kb pages

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Muscat, Anthony January 28, 2004.

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  • University of Arizona
    Publisher Info: University of Arizona (United States)
    Place of Publication: Tucson, Arizona

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Description

OAK-B135 This research work focused on control of the reactive species inside a plasma through measurement and manipulation of the electron energy distribution function (EEDF) and on understanding the surface reaction mechanisms on the substrate exposed to a combination of ion and atom beam sources to simulate a real plasma. A GEC chamber (Gaseous Electronic Conference Reference Cell)8 with a mass spectrometer and a Langmuir probe (LP) system were used for this research. It was found that H2 and N2 additives to an Ar plasma could effectively change the EEDF and the average electron temperature (Te). This finding provides the possibility to selectively control reaction rates in the plasma to control etching selectivity on a surface. This concept was demonstrated in Ar/N2/H2 and Ar/CH4 /H2 systems.

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315kb pages

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INIS; OSTI as DE00820945

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  • Other Information: PBD: 28 Jan 2004

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  • Report No.: NONE
  • Grant Number: FG03-00ER54581
  • DOI: 10.2172/820945 | External Link
  • Office of Scientific & Technical Information Report Number: 820945
  • Archival Resource Key: ark:/67531/metadc734295

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

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  • January 28, 2004

Added to The UNT Digital Library

  • Oct. 18, 2015, 6:40 p.m.

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  • Oct. 26, 2015, 9:22 p.m.

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Muscat, Anthony. Final Project Report for Grant DE-FG03-00ER54581 Selective Control of Chemical Reactions With Plasmas, report, January 28, 2004; Tucson, Arizona. (digital.library.unt.edu/ark:/67531/metadc734295/: accessed May 27, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.