Laser Acoustic Microstructure Analysis at the Micron and Nanometer Length Scale Page: 4 of 9
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InPhase Quadrature
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SII EL Agilent Teehnlogii870 880
Frequency (Mz)Figure 1. Inphase and quadrature images of a thin film bulk acoustic wave
resonator near its first thickness mode with the electrical impedance. An image of
the actual resonator plate is shown in the insert of the electrical impedance.
Figure 2 shows an image of acoustic motion at 862 MHz in the plate. Given the length and
width of the plate (170 m x 160 m), the Fourier transformed image shows the smallest
wavelength present at about 4.5 jm. The ultimate resolution of this imaging technique is believed to
be the same as other optical methods, roughly a half wavelength of light. Work is in progress to
determine the ultimate resolution of this acoustic imaging probe at the micron scale.F BAR#12eflI_QC862 OOMH7OdegL0-May-2002
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t 1 ( j )-100 50 D 0 I1 -02 -01 0 01 02 .
(,) .mL, pix= 11 t-2 -m) Kxmax 1 414, Kymaxm1 336
Figure 2: (left) Image of an acoustic mode at 862 MHz, (right) magnitude of the Fourier transform
showing the presence of multimodes and the smallest spatial wavelength of about 4.5 m.p
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Telschow, K.L. & Hurley, D.H. Laser Acoustic Microstructure Analysis at the Micron and Nanometer Length Scale, article, May 15, 2002; Idaho Falls, Idaho. (https://digital.library.unt.edu/ark:/67531/metadc734230/m1/4/: accessed April 25, 2024), University of North Texas Libraries, UNT Digital Library, https://digital.library.unt.edu; crediting UNT Libraries Government Documents Department.