An Investigation into the Response of a Micro Electro Mechanical Compound Pivot Mirror Using Finite Element Modeling

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Description

This report is a presentation of modeling and simulation work for analyzing three designs of Micro Electro Mechanical (MEM) Compound Pivot Mirrors (CPM). These CPMs were made at Sandia National Laboratories using the SUMMiT{trademark} process. At 75 volts and above, initial experimental analysis of fabricated mirrors showed tilt angles of up to 7.5 degrees for one design, and 5 degrees for the other two. Nevertheless, geometric design models predicted higher tilt angles. Therefore, a detailed study was conducted to explain why lower tilt angles occurred and if design modifications could be made to produce higher tilt angles at lower voltages. ... continued below

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18 pages

Creation Information

GASS, FAWN R. & DOHNER, JEFFREY L. January 1, 2002.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM, and Livermore, CA (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

This report is a presentation of modeling and simulation work for analyzing three designs of Micro Electro Mechanical (MEM) Compound Pivot Mirrors (CPM). These CPMs were made at Sandia National Laboratories using the SUMMiT{trademark} process. At 75 volts and above, initial experimental analysis of fabricated mirrors showed tilt angles of up to 7.5 degrees for one design, and 5 degrees for the other two. Nevertheless, geometric design models predicted higher tilt angles. Therefore, a detailed study was conducted to explain why lower tilt angles occurred and if design modifications could be made to produce higher tilt angles at lower voltages. This study showed that the spring stiffnesses of the CPMs were too great to allow for desired levels of rotation at lower levels of voltage. To produce these lower stiffnesses, a redesign is needed.

Physical Description

18 pages

Source

  • Other Information: PBD: 1 Jan 2002

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  • Report No.: SAND2002-0247
  • Grant Number: AC04-94AL85000
  • DOI: 10.2172/793321 | External Link
  • Office of Scientific & Technical Information Report Number: 793321
  • Archival Resource Key: ark:/67531/metadc734032

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

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  • January 1, 2002

Added to The UNT Digital Library

  • Oct. 19, 2015, 7:39 p.m.

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  • April 12, 2016, 2:23 p.m.

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GASS, FAWN R. & DOHNER, JEFFREY L. An Investigation into the Response of a Micro Electro Mechanical Compound Pivot Mirror Using Finite Element Modeling, report, January 1, 2002; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc734032/: accessed November 22, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.