Optimal dynamic performance for high-precision actuators/stages.

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System dynamic performance of actuator/stage groups, such as those found in optical instrument positioning systems and other high-precision applications, is dependent upon both individual component behavior and the system configuration. Experimental modal analysis techniques were implemented to determine the six degree of freedom stiffnesses and damping for individual actuator components. These experimental data were then used in a multibody dynamic computer model to investigate the effect of stage group configuration. Running the computer model through the possible stage configurations and observing the predicted vibratory response determined the optimal stage group configuration. Configuration optimization can be performed for any group of ... continued below

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Preissner, C.; Lee, S.-H.; Royston, T. J. & Shu, D. July 3, 2002.

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System dynamic performance of actuator/stage groups, such as those found in optical instrument positioning systems and other high-precision applications, is dependent upon both individual component behavior and the system configuration. Experimental modal analysis techniques were implemented to determine the six degree of freedom stiffnesses and damping for individual actuator components. These experimental data were then used in a multibody dynamic computer model to investigate the effect of stage group configuration. Running the computer model through the possible stage configurations and observing the predicted vibratory response determined the optimal stage group configuration. Configuration optimization can be performed for any group of stages, provided there is stiffness and damping data available for the constituent pieces.

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  • SPIE, Conference location not supplied, Conference dates not supplied

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  • Report No.: ANL/XFD/CP-108102
  • Grant Number: W-31-109-ENG-38
  • Office of Scientific & Technical Information Report Number: 797927
  • Archival Resource Key: ark:/67531/metadc733471

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  • July 3, 2002

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  • Oct. 19, 2015, 7:39 p.m.

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  • March 23, 2016, 10:57 a.m.

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Preissner, C.; Lee, S.-H.; Royston, T. J. & Shu, D. Optimal dynamic performance for high-precision actuators/stages., article, July 3, 2002; Illinois. (digital.library.unt.edu/ark:/67531/metadc733471/: accessed November 20, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.