Group velocity delay spectroscopy technique for industrial monitoring of electron beam induced vapors

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Spectroscopic techniques are ideal for characterization and process control of electron beam generated vapor plumes. Absorption based techniques work well for a wide variety of applications, but are difficult to apply to optically dense or opaque vapor plumes. We describe an approach for monitoring optically dense vapor plumes that is based on measuring the group velocity delay of a laser beam near an optical transition to determine the vapor density. This technique has a larger dynamic range than absorption spectroscopy. We describe our progress towards a robust system to monitor aluminum vaporization in an industrial environment. Aluminum was chosen because ... continued below

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Benterou, J J; Berzins, L V & Sharma, M N September 24, 1998.

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Description

Spectroscopic techniques are ideal for characterization and process control of electron beam generated vapor plumes. Absorption based techniques work well for a wide variety of applications, but are difficult to apply to optically dense or opaque vapor plumes. We describe an approach for monitoring optically dense vapor plumes that is based on measuring the group velocity delay of a laser beam near an optical transition to determine the vapor density. This technique has a larger dynamic range than absorption spectroscopy. We describe our progress towards a robust system to monitor aluminum vaporization in an industrial environment. Aluminum was chosen because of its prevalence in high performance aircraft alloys. In these applications, composition control of the alloy constituents is critical to the deposition process. Data is presented demonstrating the superior dynamic range of the measurement. In addition, preliminary data demonstrating aluminum vapor rate control in an electron beam evaporator is presented. Alternative applications where this technique could be useful are discussed. Keywords: Group velocity delay spectroscopy, optical beat signal, optical heterodyne, index of refraction, laser absorption spectroscopy, external cavity diode laser (ECDL), electron beam vaporization, vapor density, vapor phase manufacturing, process control

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374 Kilobytes

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  • Society of Photo-Optical Instrumentation Engineers (SPIE) Photonics East: International Symposium on Industrial and Environmental Monitors and Biosensors, Boston, MA, November 1-6, 1998

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  • Other: DE00007813
  • Report No.: UCRL-JC-130335
  • Grant Number: W-7405-Eng-48
  • Office of Scientific & Technical Information Report Number: 7813
  • Archival Resource Key: ark:/67531/metadc722314

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Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • September 24, 1998

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  • Sept. 29, 2015, 5:31 a.m.

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  • Feb. 23, 2016, 7:56 p.m.

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Benterou, J J; Berzins, L V & Sharma, M N. Group velocity delay spectroscopy technique for industrial monitoring of electron beam induced vapors, article, September 24, 1998; Livermore, California. (digital.library.unt.edu/ark:/67531/metadc722314/: accessed October 20, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.