Actinic defect counting statistics over 1 cm2 area of EUVL mask blank

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As a continuation of comparison experiments between EUV inspection and visible inspection of defects on EUVL mask blanks, we report on the result of an experiment where the EUV defect inspection tool is used to perform at-wavelength defect counting over 1 cm{sup 2} of EUVL mask blank. Initial EUV inspection found five defects over the scanned area and the subsequent optical scattering inspection was able to detect all of the five defects. Therefore, if there are any defects that are only detectable by EUV inspection, the density is lower than the order of unity per cm2. An upgrade path to ... continued below

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10 pages; OS: Windows

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Jeong, Seongtae; Lai, Chih-Wei; Rekawa, Seno; Walton, Chris W. & Bokor, Jeffrey February 18, 2000.

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Description

As a continuation of comparison experiments between EUV inspection and visible inspection of defects on EUVL mask blanks, we report on the result of an experiment where the EUV defect inspection tool is used to perform at-wavelength defect counting over 1 cm{sup 2} of EUVL mask blank. Initial EUV inspection found five defects over the scanned area and the subsequent optical scattering inspection was able to detect all of the five defects. Therefore, if there are any defects that are only detectable by EUV inspection, the density is lower than the order of unity per cm2. An upgrade path to substantially increase the overall throughput of the EUV inspection system is also identified in the manuscript.

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10 pages; OS: Windows

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OSTI as DE00764379

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  • Emerging Lithographic Technologies IV, Santa Clara, CA (US), 02/28/2000--03/03/2000

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  • Report No.: LBNL--45327
  • Grant Number: AC03-76SF00098
  • Office of Scientific & Technical Information Report Number: 764379
  • Archival Resource Key: ark:/67531/metadc718800

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • February 18, 2000

Added to The UNT Digital Library

  • Sept. 29, 2015, 5:31 a.m.

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  • April 1, 2016, 8:34 p.m.

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Jeong, Seongtae; Lai, Chih-Wei; Rekawa, Seno; Walton, Chris W. & Bokor, Jeffrey. Actinic defect counting statistics over 1 cm2 area of EUVL mask blank, article, February 18, 2000; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc718800/: accessed November 23, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.