Sub-Angstrom transmission electron microscopy at 300keV Metadata

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Title

  • Main Title Sub-Angstrom transmission electron microscopy at 300keV

Creator

  • Author: O'Keefe, Michael A.
    Creator Type: Personal
  • Author: Nelson, E. Christian
    Creator Type: Personal
  • Author: Turner, John H.
    Creator Type: Personal
  • Author: Thust, Andreas
    Creator Type: Personal

Contributor

  • Sponsor: United States. Department of Energy. Division of Materials Sciences.
    Contributor Type: Organization
    Contributor Info: USDOE Director, Office of Science. Office of Basic Energy Studies. Division of Materials Sciences (United States)

Publisher

  • Name: Lawrence Berkeley National Laboratory
    Place of Publication: Berkeley, California
    Additional Info: Ernest Orlando Lawrence Berkeley National Laboratory, Berkeley, CA (United States)

Date

  • Creation: 2001-02-14

Language

  • English

Description

  • Content Description: We have demonstrated sub-Angstrom TEM to a resolution of 0.78 Angstrom with the one-Angstrom microscope (OAM) project at the National Center for Electron Microscopy. The OAM combines a modified CM300FEG-UT with computer software able to generate sub-Angstrom images from experimental image series. We achieved sub-Angstrom resolution with the OAM by paying close attention to detail. We placed the TEM in a favorable environment. We reduced its three-fold astigmatism A2 from 2.46mm to 300 Angstrom (corresponding to transfer of 0.68 Angstrom spacings at a pi/4 phase limit). We improved its information limit by minimizing high-voltage and lens current ripple. Energy spread of 0.93eV FWHH gave a focus spread of 20 Angstrom and an information limit of 0.78 Angstrom, allowing successful resolution of the 0.89 Angstrom (400) atom spacings in [110] diamond. As a further test, we reduced the electron gun extraction voltage to 3kV to improve our information limit to 0.75 Angstrom, and then imaged 0 .7 Angstrom (444) atom spacings in [112] silicon as distinct pairs of 'white atoms' near an alpha-null defocus of -3783 Angstrom.
  • Physical Description: vp.

Subject

  • Keyword: Microanalysis
  • Keyword: Atoms
  • Keyword: Silicon High-Resolution Electron Microscopy Sub-Angstrom Microscopy
  • Keyword: Spatial Resolution
  • Keyword: High-Resolution Electron Microscopy Sub-Angstrom Microscopy
  • Keyword: Electron Guns
  • STI Subject Categories: 47 Other Instrumentation
  • Keyword: Transmission Electron Microscopy

Source

  • Conference: Microscopy and Microanalysis 2001, Long Beach, CA (US), 08/05/2001--08/09/2001

Collection

  • Name: Office of Scientific & Technical Information Technical Reports
    Code: OSTI

Institution

  • Name: UNT Libraries Government Documents Department
    Code: UNTGD

Resource Type

  • Article

Format

  • Text

Identifier

  • Report No.: LBNL--47531
  • Grant Number: AC03-76SF00098
  • Office of Scientific & Technical Information Report Number: 789145
  • Archival Resource Key: ark:/67531/metadc718736

Note

  • Display Note: OSTI as DE00789145
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