Sub-Angstrom transmission electron microscopy at 300keV

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We have demonstrated sub-Angstrom TEM to a resolution of 0.78 Angstrom with the one-Angstrom microscope (OAM) project at the National Center for Electron Microscopy. The OAM combines a modified CM300FEG-UT with computer software able to generate sub-Angstrom images from experimental image series. We achieved sub-Angstrom resolution with the OAM by paying close attention to detail. We placed the TEM in a favorable environment. We reduced its three-fold astigmatism A2 from 2.46mm to 300 Angstrom (corresponding to transfer of 0.68 Angstrom spacings at a pi/4 phase limit). We improved its information limit by minimizing high-voltage and lens current ripple. Energy spread ... continued below

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O'Keefe, Michael A.; Nelson, E. Christian; Turner, John H. & Thust, Andreas February 14, 2001.

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We have demonstrated sub-Angstrom TEM to a resolution of 0.78 Angstrom with the one-Angstrom microscope (OAM) project at the National Center for Electron Microscopy. The OAM combines a modified CM300FEG-UT with computer software able to generate sub-Angstrom images from experimental image series. We achieved sub-Angstrom resolution with the OAM by paying close attention to detail. We placed the TEM in a favorable environment. We reduced its three-fold astigmatism A2 from 2.46mm to 300 Angstrom (corresponding to transfer of 0.68 Angstrom spacings at a pi/4 phase limit). We improved its information limit by minimizing high-voltage and lens current ripple. Energy spread of 0.93eV FWHH gave a focus spread of 20 Angstrom and an information limit of 0.78 Angstrom, allowing successful resolution of the 0.89 Angstrom (400) atom spacings in [110] diamond. As a further test, we reduced the electron gun extraction voltage to 3kV to improve our information limit to 0.75 Angstrom, and then imaged 0 .7 Angstrom (444) atom spacings in [112] silicon as distinct pairs of 'white atoms' near an alpha-null defocus of -3783 Angstrom.

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OSTI as DE00789145

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  • Microscopy and Microanalysis 2001, Long Beach, CA (US), 08/05/2001--08/09/2001

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  • Report No.: LBNL--47531
  • Grant Number: AC03-76SF00098
  • Office of Scientific & Technical Information Report Number: 789145
  • Archival Resource Key: ark:/67531/metadc718736

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • February 14, 2001

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  • Sept. 29, 2015, 5:31 a.m.

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  • April 4, 2016, 2:30 p.m.

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O'Keefe, Michael A.; Nelson, E. Christian; Turner, John H. & Thust, Andreas. Sub-Angstrom transmission electron microscopy at 300keV, article, February 14, 2001; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc718736/: accessed December 15, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.