Ultrathin diamond-like carbon films deposited by filtered carbon vacuum arcs

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Description

Ultrathin (< 5 nm) hard carbon films are of great interest to the magnetic storage industry as the areal density approaches 100 Gbit/in{sup 2}. These films are used as overcoats to protect the magnetic layers on disk media and the active elements of the read-write slider. Tetrahedral amorphous carbon films can be produced by filtered cathodic arc deposition, but the films will only be accepted by the storage industry only if the ''macroparticle'' issue has been solved. Better plasma filters have been developed over recent years. Emphasis is put on the promising twist filter system - a compact, open structure ... continued below

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21 pages

Creation Information

Anders, Andre; Fong, Walton; Kulkarni, Ashok; Ryan, Francis W. & Bhatia, C. Singh July 13, 2001.

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Description

Ultrathin (< 5 nm) hard carbon films are of great interest to the magnetic storage industry as the areal density approaches 100 Gbit/in{sup 2}. These films are used as overcoats to protect the magnetic layers on disk media and the active elements of the read-write slider. Tetrahedral amorphous carbon films can be produced by filtered cathodic arc deposition, but the films will only be accepted by the storage industry only if the ''macroparticle'' issue has been solved. Better plasma filters have been developed over recent years. Emphasis is put on the promising twist filter system - a compact, open structure that operates with pulsed arcs and high magnetic field. Based on corrosion tests it is shown that the macroparticle reduction by the twist filter is satisfactory for this demanding application, while plasma throughput is very high. Ultrathin hard carbon films have been synthesized using S-filter and twist filter systems. Film properties such as hardness, elastic modulus, wear, and corrosion resistance have been tested.

Physical Description

21 pages

Notes

OSTI as DE00788049

Source

  • 19th International Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV 2000), Xian (CN), 09/18/2000--09/22/2000

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  • Report No.: LBNL--48647
  • Grant Number: AC03-76SF00098
  • Office of Scientific & Technical Information Report Number: 788049
  • Archival Resource Key: ark:/67531/metadc717389

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  • July 13, 2001

Added to The UNT Digital Library

  • Sept. 29, 2015, 5:31 a.m.

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  • April 4, 2016, 2:41 p.m.

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Anders, Andre; Fong, Walton; Kulkarni, Ashok; Ryan, Francis W. & Bhatia, C. Singh. Ultrathin diamond-like carbon films deposited by filtered carbon vacuum arcs, article, July 13, 2001; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc717389/: accessed August 20, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.