Adding static printing capabilities to the EUV phase-shifting point diffraction interferometer

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While interferometry is routinely used for the characterization and alignment of lithographic optics, the ultimate performance metric for these optics is printing in photoresist. Direct comparison of imaging and wavefront performance is also useful for verifying and improving the predictive power of wavefront metrology under actual printing conditions. To address these issues, static, small-field printing capabilities are being added to the extreme ultraviolet (EUV) phase-shifting point diffraction interferometer (PS/PDI) implemented at the Advanced Light Source at Lawrence Berkeley National Laboratory. This Sub-field Exposure Station (SES) will enable the earliest possible imaging characterization of the upcoming Engineering Test Stand (ETS) Set-2 ... continued below

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7 pages

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Naulleau, Patrick; Goldberg, Kenneth A.; Anderson, Erik H.; Batson, Phillip; Denham, Paul; Jackson, Keith et al. March 1, 2001.

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Description

While interferometry is routinely used for the characterization and alignment of lithographic optics, the ultimate performance metric for these optics is printing in photoresist. Direct comparison of imaging and wavefront performance is also useful for verifying and improving the predictive power of wavefront metrology under actual printing conditions. To address these issues, static, small-field printing capabilities are being added to the extreme ultraviolet (EUV) phase-shifting point diffraction interferometer (PS/PDI) implemented at the Advanced Light Source at Lawrence Berkeley National Laboratory. This Sub-field Exposure Station (SES) will enable the earliest possible imaging characterization of the upcoming Engineering Test Stand (ETS) Set-2 projection optics. Relevant printing studies with the ETS projection optics require illumination partial coherence with {sigma} of approximately 0.7. This {sigma} value is very different from the coherent illumination requirements of the EUV PS/PDI and the coherence properties naturally provided by synchrotron undulator beamline illumination. Adding printing capabilities to the PS/PDI experimental system thus necessitates the development of an alternative illumination system capable of destroying the inherent coherence of the beamline. The SES is being implemented with two independent illuminators: the first is based on a novel EUV diffuser currently under development and the second is based on a scanning mirror design. Here we describe the design and implementation of the new SES, including a discussion of the illuminators and the fabrication of the EUV diffuser.

Physical Description

7 pages

Notes

INIS; OSTI as DE00789132

Source

  • SPIE's 26th Annual International Symposium on Microlithography, Santa Clara, CA (US), 02/25/2001--03/02/2001

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  • Report No.: LBNL--46938
  • Grant Number: AC03-76SF00098
  • Office of Scientific & Technical Information Report Number: 789132
  • Archival Resource Key: ark:/67531/metadc717291

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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Creation Date

  • March 1, 2001

Added to The UNT Digital Library

  • Sept. 29, 2015, 5:31 a.m.

Description Last Updated

  • April 1, 2016, 8:35 p.m.

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Naulleau, Patrick; Goldberg, Kenneth A.; Anderson, Erik H.; Batson, Phillip; Denham, Paul; Jackson, Keith et al. Adding static printing capabilities to the EUV phase-shifting point diffraction interferometer, article, March 1, 2001; Berkeley, California. (digital.library.unt.edu/ark:/67531/metadc717291/: accessed May 24, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.