Focused Ion beam source method and Apparatus

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Description

A focused ion beam having a cross section of submicron diameter, a high ion current, and a narrow energy range is generated from a target comprised of particle source material by laser ablation. The method involves directing a laser beam having a cross section of critical diameter onto the target, producing a cloud of laser ablated particles having unique characteristics, and extracting and focusing a charged particle beam from the laser ablated cloud. The method is especially suited for producing focused ion beams for semiconductor device analysis and modification.

Physical Description

20 p.

Creation Information

Pellin, Michael J.; Lykke, Keith R. & Lill, Thorsten B. August 17, 1998.

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This patent is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. More information about this patent can be viewed below.

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Description

A focused ion beam having a cross section of submicron diameter, a high ion current, and a narrow energy range is generated from a target comprised of particle source material by laser ablation. The method involves directing a laser beam having a cross section of critical diameter onto the target, producing a cloud of laser ablated particles having unique characteristics, and extracting and focusing a charged particle beam from the laser ablated cloud. The method is especially suited for producing focused ion beams for semiconductor device analysis and modification.

Physical Description

20 p.

Notes

OSTI as DE00782758

Medium: P; Size: 20 pages

Source

  • Patent File Date: 1998 Aug 17

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  • Report No.: PATENTS-US--A9134928
  • Grant Number: W-31-109-ENG-38
  • Office of Scientific & Technical Information Report Number: 782758
  • Archival Resource Key: ark:/67531/metadc717041

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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Creation Date

  • August 17, 1998

Added to The UNT Digital Library

  • Sept. 29, 2015, 5:31 a.m.

Description Last Updated

  • April 7, 2017, 7:13 p.m.

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Pellin, Michael J.; Lykke, Keith R. & Lill, Thorsten B. Focused Ion beam source method and Apparatus, patent, August 17, 1998; Illinois. (digital.library.unt.edu/ark:/67531/metadc717041/: accessed November 19, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.