SETEC/Semiconductor Manufacturing Technologies Program: 1999 Annual and Final Report Metadata

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Title

  • Main Title SETEC/Semiconductor Manufacturing Technologies Program: 1999 Annual and Final Report

Creator

  • Author: McBrayer, John D.
    Creator Type: Personal

Contributor

  • Sponsor: United States. Department of Energy.
    Contributor Type: Organization
    Contributor Info: US Department of Energy (United States)

Publisher

  • Name: Sandia National Laboratories
    Place of Publication: Albuquerque, New Mexico
    Additional Info: Sandia National Labs., Albuquerque, NM (United States)
  • Name: Sandia National Laboratories
    Place of Publication: Livermore, California
    Additional Info: Sandia National Labs., Livermore, CA (United States)

Date

  • Creation: 2000-12

Language

  • English

Description

  • Content Description: This report summarizes the results of work conducted by the Semiconductor Manufacturing Technologies Program at Sandia National Laboratories (Sandia) during 1999. This work was performed by one working group: the Semiconductor Equipment Technology Center (SETEC). The group's projects included Numerical/Experimental Characterization of the Growth of Single-Crystal Calcium Fluoride (CaF{sub 2}); The Use of High-Resolution Transmission Electron Microscopy (HRTEM) Imaging for Certifying Critical-Dimension Reference Materials Fabricated with Silicon Micromachining; Assembly Test Chip for Flip Chip on Board; Plasma Mechanism Validation: Modeling and Experimentation; and Model-Based Reduction of Contamination in Gate-Quality Nitride Reactor. During 1999, all projects focused on meeting customer needs in a timely manner and ensuring that projects were aligned with the goals of the National Technology Roadmap for Semiconductors sponsored by the Semiconductor Industry Association and with Sandia's defense mission. This report also provides a short history of the Sandia/SEMATECH relationship and a brief on all projects completed during the seven years of the program.
  • Physical Description: Medium: P; Size: 62 pages

Subject

  • Keyword: Semiconductor Devices
  • Keyword: Mathematical Models
  • Keyword: Nitrides
  • STI Subject Categories: 42 Engineering
  • Keyword: Microelectronic Circuits
  • Keyword: Impurities
  • Keyword: Manufacturing
  • Keyword: Validation
  • Keyword: Calcium Fluorides

Source

  • Other Information: PBD: 1 Dec 2000

Collection

  • Name: Office of Scientific & Technical Information Technical Reports
    Code: OSTI

Institution

  • Name: UNT Libraries Government Documents Department
    Code: UNTGD

Resource Type

  • Report

Format

  • Text

Identifier

  • Report No.: SAND2000-2845
  • Grant Number: AC04-94AL85000
  • DOI: 10.2172/772043
  • Office of Scientific & Technical Information Report Number: 772043
  • Archival Resource Key: ark:/67531/metadc716928

Note

  • Display Note: OSTI as DE00772043