SETEC/Semiconductor Manufacturing Technologies Program: 1999 Annual and Final Report Page: 4 of 65
This report is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided to Digital Library by the UNT Libraries Government Documents Department.
The following text was automatically extracted from the image on this page using optical character recognition software:
Printed December 2000
Program: 1999 Annual and Final
John McBrayer, Ph.D.
Design and Products, Dept 1730
Sandia National Laboratories
Albuquerque, NM 87185-1071
This report summarizes the results of work conducted by the Semiconductor
Manufacturing Technologies Program at Sandia National Laboratories (Sandia)
during 1999. This work was performed by one working group: the Semiconductor
Equipment Technology Center (SETEC). The group's projects included
Numerical/Experimental Characterization of the Growth of Single-Crystal
Calcium Fluoride (CaF2); The Use of High-Resolution Transmission Electron
Microscopy (HRTEM) Imaging for Certifying Critical-Dimension Reference
Materials Fabricated with Silicon Micromachining; Assembly Test Chip for Flip
Chip on Board; Plasma Mechanism Validation: Modeling and Experimentation;
and Model-Based Reduction of Contamination in Gate-Quality Nitride Reactor.
During 1999, all projects focused on meeting customer needs in a timely manner
and ensuring that projects were aligned with the goals of the National Technology
Roadmap for Semiconductors sponsored by the Semiconductor Industry
Association and with Sandia's defense mission.
This report also provides a short history of the Sandia/SEMATECH relationship
and a brief on all projects completed during the seven years of the program. And
as such, this is the final report for the Sandia/SEMATECH Cooperative Research
and Development Agreement (CRADA), SC92/01082.
Here’s what’s next.
This report can be searched. Note: Results may vary based on the legibility of text within the document.
Tools / Downloads
Get a copy of this page or view the extracted text.
Citing and Sharing
Basic information for referencing this web page. We also provide extended guidance on usage rights, references, copying or embedding.
Reference the current page of this Report.
McBrayer, John D. SETEC/Semiconductor Manufacturing Technologies Program: 1999 Annual and Final Report, report, December 2000; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc716928/m1/4/: accessed January 21, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.