Energetic Deposition in Vacuum

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In hoping to improve Niobium deposition on Copper cavity, a vacuum deposition system has been built to test the idea of Nb energetic condensation on copper substrate. The system directly uses microwave power to create the pure Nb plasma, which can be used to extract energetic Nb ion flux to do direct deposition on copper substrate. In this paper, we briefly describe the system, discuss the potential benefit of this technique and report the initial result of Nb plasma creation and Niobium thin film deposition.

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312 Kilobytes pages

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Wu, G.; Phillips, L.; Sundelin, R. & Goodman, T. September 1, 2001.

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Description

In hoping to improve Niobium deposition on Copper cavity, a vacuum deposition system has been built to test the idea of Nb energetic condensation on copper substrate. The system directly uses microwave power to create the pure Nb plasma, which can be used to extract energetic Nb ion flux to do direct deposition on copper substrate. In this paper, we briefly describe the system, discuss the potential benefit of this technique and report the initial result of Nb plasma creation and Niobium thin film deposition.

Physical Description

312 Kilobytes pages

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  • 10th SRF Workshop, Tsukuba (JP), 09/06/2001--09/11/2001

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  • Report No.: JLAB-OTP-01-03
  • Report No.: DOE/ER/40150-1900
  • Grant Number: AC05-84ER40150
  • Office of Scientific & Technical Information Report Number: 786146
  • Archival Resource Key: ark:/67531/metadc716507

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  • September 1, 2001

Added to The UNT Digital Library

  • Sept. 29, 2015, 5:31 a.m.

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  • Feb. 5, 2016, 8:03 p.m.

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Wu, G.; Phillips, L.; Sundelin, R. & Goodman, T. Energetic Deposition in Vacuum, article, September 1, 2001; Newport News, Virginia. (digital.library.unt.edu/ark:/67531/metadc716507/: accessed September 20, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.