Optimization of the Ion-Cut Process in Si and SiC Metadata

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Title

  • Main Title Optimization of the Ion-Cut Process in Si and SiC

Creator

  • Author: Holland, O.W.
    Creator Type: Personal

Contributor

  • Sponsor: United States. Department of Energy.
    Contributor Type: Organization
    Contributor Info: US Department of Energy (United States)

Publisher

  • Name: Oak Ridge National Laboratory
    Place of Publication: Tennessee
    Additional Info: Oak Ridge National Lab., TN (United States)

Date

  • Creation: 2001-01-05

Language

  • English

Description

  • Content Description: No abstract prepared.
  • Physical Description: vp.

Subject

  • Keyword: Optimization
  • STI Subject Categories: 36 Materials Science
  • Keyword: Fabrication
  • Keyword: Silicon Carbides
  • Keyword: Silicon

Source

  • Conference: Fall 2000 Materials Research Society Meeting, Boston, MA (US), 11/27/2000--12/01/2000

Collection

  • Name: Office of Scientific & Technical Information Technical Reports
    Code: OSTI

Institution

  • Name: UNT Libraries Government Documents Department
    Code: UNTGD

Resource Type

  • Article

Format

  • Text

Identifier

  • Report No.: P00-109467
  • Grant Number: AC05-96OR22464
  • Office of Scientific & Technical Information Report Number: 774479
  • Archival Resource Key: ark:/67531/metadc716261