Roughness in sputtered multilayers analyzed by transmission electron microscopy and x-ray diffuse scattering.

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Sputtered W/C muhilayers with a period of 25 {angstrom} have been studied both by cross-section TEM and by x-ray diffuse scattering using 10 keV synchrotrons radiation. Fitting to the x-ray data is aided by the TEM images in modeling the roughness and roughness propagation within the Born approximation. We report on a study of the correctness of the often applied small roughness approximation, and we find that is not well justified in the present case. In order to probe short lateral length scales at q{sub y} = 0.1 {angstrom}{sup -1}, diffuse scattering data were obtained in an unconventional scattering geometry.

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11 p.

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Macrander, A. T.; Liu, C.; Csencsits, R.; Cook, R.; Kirk, M. & Headrick, R. November 8, 1999.

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Sputtered W/C muhilayers with a period of 25 {angstrom} have been studied both by cross-section TEM and by x-ray diffuse scattering using 10 keV synchrotrons radiation. Fitting to the x-ray data is aided by the TEM images in modeling the roughness and roughness propagation within the Born approximation. We report on a study of the correctness of the often applied small roughness approximation, and we find that is not well justified in the present case. In order to probe short lateral length scales at q{sub y} = 0.1 {angstrom}{sup -1}, diffuse scattering data were obtained in an unconventional scattering geometry.

Physical Description

11 p.

Notes

INIS; OSTI as DE00750467

Medium: P; Size: 11 pages

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  • 6th International Conference on Surface X-ray and Neutron Scattering, Noordwijkerhout (NL), 09/12/1999--09/17/1999

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  • Report No.: ANL/XFD/CP-99205
  • Grant Number: W-31-109-ENG-38
  • Office of Scientific & Technical Information Report Number: 750467
  • Archival Resource Key: ark:/67531/metadc712221

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  • November 8, 1999

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  • Sept. 12, 2015, 6:31 a.m.

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  • April 6, 2017, 7:36 p.m.

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Macrander, A. T.; Liu, C.; Csencsits, R.; Cook, R.; Kirk, M. & Headrick, R. Roughness in sputtered multilayers analyzed by transmission electron microscopy and x-ray diffuse scattering., article, November 8, 1999; Illinois. (digital.library.unt.edu/ark:/67531/metadc712221/: accessed September 26, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.