Mechanical properties of Cu/Ta multilayers prepared by magnetron sputtering

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The microstructure and mechanical properties of sputtered Cu/Ta multilayers were studied. X- ray diffraction and transmission electron microscopy characterization indicate that both the Ta and Cu in the 2 nm period multilayer are predominantly amorphous, while in longer period samples, the layers are crystalline, with the metastable tetragonal {beta}-Ta observed. No observable microstructure changes upon annealing at 300{degrees}C were found. An average Vickers micro- hardness value of about 5.5 GPa was measured, which increases about 5% upon annealing at 300{degrees}C. Residual stress in the multilayers and its dependence on thermal annealing are reported. The relationships between microstructure and mechanical properties ... continued below

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10 p.

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Nguyen, T.D. & Barbee, T.W., Jr. April 1, 1998.

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The microstructure and mechanical properties of sputtered Cu/Ta multilayers were studied. X- ray diffraction and transmission electron microscopy characterization indicate that both the Ta and Cu in the 2 nm period multilayer are predominantly amorphous, while in longer period samples, the layers are crystalline, with the metastable tetragonal {beta}-Ta observed. No observable microstructure changes upon annealing at 300{degrees}C were found. An average Vickers micro- hardness value of about 5.5 GPa was measured, which increases about 5% upon annealing at 300{degrees}C. Residual stress in the multilayers and its dependence on thermal annealing are reported. The relationships between microstructure and mechanical properties in the multilayers are discussed.

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10 p.

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OSTI as DE98057690

Other: FDE: PDF; PL:

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  • Spring meeting of the Materials Research Society, San Francisco, CA (United States), 13-17 Apr 1998

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  • Other: DE98057690
  • Report No.: UCRL-JC--130782
  • Report No.: CONF-980405--
  • Grant Number: W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 665625
  • Archival Resource Key: ark:/67531/metadc712163

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  • April 1, 1998

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  • Sept. 12, 2015, 6:31 a.m.

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  • April 6, 2017, 6:27 p.m.

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Nguyen, T.D. & Barbee, T.W., Jr. Mechanical properties of Cu/Ta multilayers prepared by magnetron sputtering, article, April 1, 1998; California. (digital.library.unt.edu/ark:/67531/metadc712163/: accessed December 15, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.