Miniaturized Environmental Monitoring Instrumentation

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Description

The objective of the Mass Spectrograph on a Chip (MSOC) program is the development of a miniature, multi-species gas sensor fabricated using silicon micromachining technology which will be orders of magnitude smaller and lower power consumption than a conventional mass spectrometer. The sensing and discrimination of this gas sensor are based on an ionic mass spectrograph, using magnetic and/or electrostatic fields. The fields cause a spatial separation of the ions according to their respective mass-to-charge ratio. The fabrication of this device involves the combination of microelectronics with micromechanically built sensors and, ultimately, vacuum pumps. The prototype of a chemical sensor ... continued below

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Medium: P; Size: 110 pages

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Freidhoff, C. B. September 1, 1997.

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This report is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. More information about this report can be viewed below.

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Description

The objective of the Mass Spectrograph on a Chip (MSOC) program is the development of a miniature, multi-species gas sensor fabricated using silicon micromachining technology which will be orders of magnitude smaller and lower power consumption than a conventional mass spectrometer. The sensing and discrimination of this gas sensor are based on an ionic mass spectrograph, using magnetic and/or electrostatic fields. The fields cause a spatial separation of the ions according to their respective mass-to-charge ratio. The fabrication of this device involves the combination of microelectronics with micromechanically built sensors and, ultimately, vacuum pumps. The prototype of a chemical sensor would revolutionize the method of performing environmental monitoring for both commercial and government applications. The portable unit decided upon was the miniaturized gas chromatograph with a mass spectrometer detector, referred to as a GC/MS in the analytical marketplace.

Physical Description

Medium: P; Size: 110 pages

Notes

OSTI as DE00756585

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  • Other Information: PBD: 1 Sep 1997

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  • Report No.: DOE/ID/13292
  • Grant Number: FC07-94ID13292
  • DOI: 10.2172/756585 | External Link
  • Office of Scientific & Technical Information Report Number: 756585
  • Archival Resource Key: ark:/67531/metadc712096

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Creation Date

  • September 1, 1997

Added to The UNT Digital Library

  • Sept. 12, 2015, 6:31 a.m.

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  • April 21, 2016, 2:30 p.m.

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Freidhoff, C. B. Miniaturized Environmental Monitoring Instrumentation, report, September 1, 1997; United States. (digital.library.unt.edu/ark:/67531/metadc712096/: accessed August 21, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.