Microsystems - The next big thing

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Micro-Electro-Mechanical Systems (MEMS) is a big name for tiny devices that will soon make big changes in everyday life and the workplace. These and other types of Microsystems range in size from a few millimeters to a few microns, much smaller than a human hair. These Microsystems have the capability to enable new ways to solve problems in commercial applications ranging from automotive, aerospace, telecommunications, manufacturing equipment, medical diagnostics to robotics, and in national security applications such as nuclear weapons safety and security, battlefield intelligence, and protection against chemical and biological weapons. This broad range of applications of Microsystems reflects ... continued below

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5 p.

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STINNETT,REGAN W. May 11, 2000.

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This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. More information about this article can be viewed below.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM, and Livermore, CA (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

Micro-Electro-Mechanical Systems (MEMS) is a big name for tiny devices that will soon make big changes in everyday life and the workplace. These and other types of Microsystems range in size from a few millimeters to a few microns, much smaller than a human hair. These Microsystems have the capability to enable new ways to solve problems in commercial applications ranging from automotive, aerospace, telecommunications, manufacturing equipment, medical diagnostics to robotics, and in national security applications such as nuclear weapons safety and security, battlefield intelligence, and protection against chemical and biological weapons. This broad range of applications of Microsystems reflects the broad capabilities of future Microsystems to provide the ability to sense, think, act, and communicate, all in a single integrated package. Microsystems have been called the next silicon revolution, but like many revolutions, they incorporate more elements than their predecessors. Microsystems do include MEMS components fabricated from polycrystalline silicon processed using techniques similar to those used in the manufacture of integrated electrical circuits. They also include optoelectronic components made from gallium arsenide and other semiconducting compounds from the III-V groups of the periodic table. Microsystems components are also being made from pure metals and metal alloys using the LIGA process, which utilizes lithography, etching, and casting at the micron scale. Generically, Microsystems are micron scale, integrated systems that have the potential to combine the ability to sense light, heat, pressure, acceleration, vibration, and chemicals with the ability to process the collected data using CMOS circuitry, execute an electrical, mechanical, or photonic response, and communicate either optically or with microwaves.

Physical Description

5 p.

Notes

OSTI as DE00755608

Medium: P; Size: 5 pages

Source

  • Journal Name: Vacuum Technology and Coating; Other Information: Submitted to Vacuum Technology and Coating

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  • Report No.: SAND2000-1201J
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 755608
  • Archival Resource Key: ark:/67531/metadc712082

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Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

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  • May 11, 2000

Added to The UNT Digital Library

  • Sept. 12, 2015, 6:31 a.m.

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  • April 11, 2017, 12:42 p.m.

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STINNETT,REGAN W. Microsystems - The next big thing, article, May 11, 2000; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc712082/: accessed June 21, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.