Development of scanning X-ray microscopes for materials science spectromicroscopy at the Advanced Light Source

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Third generation synchrotron sources of soft x-rays provide an excellent opportunity to apply established x-ray spectroscopic materials analysis techniques to surface imaging on a sub-micron scale. This paper describes an effort underway at the Advanced Light Source (ALS) to pursue this development using Fresnel zone plate lenses. These are used to produce a sub-micron spot of x-rays for use in scanning microscopy. Several groups have developed microscopes using this technique. A specimen is rastered in the focused x-ray spot and a detector signal is acquired as a function of position to generate an image. Spectroscopic capability is added by holding ... continued below

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20 p.

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Warwick, T.; Ade, H. & Cerasari, S. July 1, 1997.

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  • Warwick, T. Lawrence Berkeley National Lab., CA (United States)
  • Ade, H. North Carlina State Univ., Raleigh, NC (United States). Dept. of Physics
  • Cerasari, S. Lawrence Berkeley National Lab., CA (United States)

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Description

Third generation synchrotron sources of soft x-rays provide an excellent opportunity to apply established x-ray spectroscopic materials analysis techniques to surface imaging on a sub-micron scale. This paper describes an effort underway at the Advanced Light Source (ALS) to pursue this development using Fresnel zone plate lenses. These are used to produce a sub-micron spot of x-rays for use in scanning microscopy. Several groups have developed microscopes using this technique. A specimen is rastered in the focused x-ray spot and a detector signal is acquired as a function of position to generate an image. Spectroscopic capability is added by holding the small spot on a feature of interest and scanning through the spectrum. The authors are pursuing two spectroscopic techniques: Near Edge X-ray Absorption Spectroscopy (NEXAFS), X-ray Photoelectron Spectroscopy (XPS) which together provide a powerful capability for light element analysis in materials science.

Physical Description

20 p.

Notes

INIS; OSTI as DE98052834

Source

  • SRI `97: 6. international conference on synchrotron radiation instrumentation, Himeji (Japan), 4-8 Aug 1997

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  • Other: DE98052834
  • Report No.: LBNL--40676
  • Report No.: LSBL--398;CONF-970889--
  • Grant Number: AC03-76SF00098
  • Office of Scientific & Technical Information Report Number: 650349
  • Archival Resource Key: ark:/67531/metadc712037

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  • July 1, 1997

Added to The UNT Digital Library

  • Sept. 12, 2015, 6:31 a.m.

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  • April 5, 2016, 1:17 p.m.

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Warwick, T.; Ade, H. & Cerasari, S. Development of scanning X-ray microscopes for materials science spectromicroscopy at the Advanced Light Source, article, July 1, 1997; California. (digital.library.unt.edu/ark:/67531/metadc712037/: accessed August 19, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.