Interface reaction characterization and interfacial effects in multilayers

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The performance of multilayer structures as x-ray, soft x-ray, and extreme ultraviolet optics is dependent an the nature of the interfaces between constituent layers. Interfacial structure and the interaction between atoms at interfaces have also been demonstrated to have significant impact on the physical properties of multilayer materials in general and thus in their performance in other applied areas. As short summary of the approaches to characterization of interfaces in multilayer structures is presented as background. Two new techniques for the experimental evaluation of interfacial structure and interfacial structure effects are then considered and examples presented. Model calculations for one ... continued below

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17 p.

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Barbee, T.W. & Wall, M.A. July 1, 1997.

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The performance of multilayer structures as x-ray, soft x-ray, and extreme ultraviolet optics is dependent an the nature of the interfaces between constituent layers. Interfacial structure and the interaction between atoms at interfaces have also been demonstrated to have significant impact on the physical properties of multilayer materials in general and thus in their performance in other applied areas. As short summary of the approaches to characterization of interfaces in multilayer structures is presented as background. Two new techniques for the experimental evaluation of interfacial structure and interfacial structure effects are then considered and examples presented. Model calculations for one of these techniques which support the experimental results are also presented. In conclusion these results are reviewed of and an assessment of their implications relative to multilayer development given.

Physical Description

17 p.

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OSTI as DE98051064

Other: FDE: PDF; PL:

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  • Annual meeting of the Society of Photo-Optical Instrumentation Engineers, San Diego, CA (United States), 27 Jul - 1 Aug 1997

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  • Other: DE98051064
  • Report No.: UCRL-JC--127976
  • Report No.: CONF-970706--
  • Grant Number: W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 647039
  • Archival Resource Key: ark:/67531/metadc711915

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Office of Scientific & Technical Information Technical Reports

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  • July 1, 1997

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  • Sept. 12, 2015, 6:31 a.m.

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  • April 10, 2017, 2:05 p.m.

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Barbee, T.W. & Wall, M.A. Interface reaction characterization and interfacial effects in multilayers, article, July 1, 1997; California. (digital.library.unt.edu/ark:/67531/metadc711915/: accessed December 16, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.