Manufacturing microsystems-on-a-chip with 5-level surface micromachining technology

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Description

An agile microsystem manufacturing technology has been developed that provides unprecedented 5 levels of independent polysilicon surface-micromachine films for the designer. Typical surface-micromachining processes offer a maximum of 3 levels, making this the most complex surface-micromachining process technology developed to date. Leveraged from the extensive infrastructure present in the microelectronics industry, the manufacturing method of polysilicon surface-micromachining offers similar advantages of high-volume, high-reliability, and batch-fabrication to microelectromechanical systems (MEMS) as has been accomplished with integrated circuits (ICs). These systems, comprised of microscopic-sized mechanical elements, are laying the foundation for a rapidly expanding, multi-billion dollar industry 2 which impacts the automotive, ... continued below

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6 p.

Creation Information

Sniegowski, J. & Rodgers, M.S. May 1, 1998.

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This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. More information about this article can be viewed below.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

An agile microsystem manufacturing technology has been developed that provides unprecedented 5 levels of independent polysilicon surface-micromachine films for the designer. Typical surface-micromachining processes offer a maximum of 3 levels, making this the most complex surface-micromachining process technology developed to date. Leveraged from the extensive infrastructure present in the microelectronics industry, the manufacturing method of polysilicon surface-micromachining offers similar advantages of high-volume, high-reliability, and batch-fabrication to microelectromechanical systems (MEMS) as has been accomplished with integrated circuits (ICs). These systems, comprised of microscopic-sized mechanical elements, are laying the foundation for a rapidly expanding, multi-billion dollar industry 2 which impacts the automotive, consumer product, and medical industries to name only a few.

Physical Description

6 p.

Notes

OSTI as DE98005722

Source

  • 2. international conference on engineering design and automation, Maui, HI (United States), 9-12 Aug 1998

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  • Other: DE98005722
  • Report No.: SAND--98-1129C
  • Report No.: CONF-980810--
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 672077
  • Archival Resource Key: ark:/67531/metadc711641

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  • May 1, 1998

Added to The UNT Digital Library

  • Sept. 12, 2015, 6:31 a.m.

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  • April 14, 2016, 7:51 p.m.

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Sniegowski, J. & Rodgers, M.S. Manufacturing microsystems-on-a-chip with 5-level surface micromachining technology, article, May 1, 1998; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc711641/: accessed August 19, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.