A filtered cathodic arc deposition apparatus and method

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Description

A filtered cathodic arc deposition method and apparatus are described for the production of highly dense, wear resistant coatings which are free from macro particles. The filtered cathodic arc deposition apparatus includes a cross shaped vacuum chamber which houses a cathode target having an evaporable surface comprised of the coating material, means for generating a stream of plasma, means for generating a transverse magnetic field, and a macro particle deflector. The transverse magnetic field bends the generated stream of plasma in the direction of a substrate. Macro particles are effectively filtered from the stream of plasma by traveling, unaffected by ... continued below

Physical Description

27 p.

Creation Information

Krauss, Alan R. December 1, 1997.

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Description

A filtered cathodic arc deposition method and apparatus are described for the production of highly dense, wear resistant coatings which are free from macro particles. The filtered cathodic arc deposition apparatus includes a cross shaped vacuum chamber which houses a cathode target having an evaporable surface comprised of the coating material, means for generating a stream of plasma, means for generating a transverse magnetic field, and a macro particle deflector. The transverse magnetic field bends the generated stream of plasma in the direction of a substrate. Macro particles are effectively filtered from the stream of plasma by traveling, unaffected by the transverse magnetic field, along the initial path of the plasma stream to a macro particle deflector. The macro particle deflector has a preformed surface which deflects macro particles away from the substrate.

Physical Description

27 p.

Notes

OSTI as DE00757399

Medium: P; Size: 27 pages

Source

  • Patent File Date: 1997 Mar 27

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  • Report No.: PATENTS-US--A8828026
  • Grant Number: W-31109-ENG-38
  • Office of Scientific & Technical Information Report Number: 757399
  • Archival Resource Key: ark:/67531/metadc711606

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

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Creation Date

  • December 1, 1997

Added to The UNT Digital Library

  • Sept. 12, 2015, 6:31 a.m.

Description Last Updated

  • April 10, 2017, 6:39 p.m.

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Citations, Rights, Re-Use

Krauss, Alan R. A filtered cathodic arc deposition apparatus and method, patent, December 1, 1997; Illinois. (digital.library.unt.edu/ark:/67531/metadc711606/: accessed April 21, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.