Multilayer coating and tests of a 10x extreme ultraviolet lithographc camera

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Description

A new set of mirrors for the SANDIA I OX microstepper has been fabricated. The optics have been tested by optical profilometry, atomic force microscopy, EUV reflectometry and EUV scattering. These measurements allow one to predict the performance of the camera. Mo/Si multilayer coatings with the required thickness profile were produced by DC magnetron sputtering using shadow masks in front of the rotating substrates. The failure errors of the new mirrors (0.6 nm) are considerably smaller than those obtained previously, while mid-spatial frequency roughness still needs improvement. This roughness reduces mostly the throughput of the system; i. e. most of ... continued below

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13 p.

Creation Information

Spiller, E.; Weber, F. J.; Montcalm, C.; Baker, S. L.; Gullikson, E. M. & Underwood, J. H. February 19, 1998.

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Description

A new set of mirrors for the SANDIA I OX microstepper has been fabricated. The optics have been tested by optical profilometry, atomic force microscopy, EUV reflectometry and EUV scattering. These measurements allow one to predict the performance of the camera. Mo/Si multilayer coatings with the required thickness profile were produced by DC magnetron sputtering using shadow masks in front of the rotating substrates. The failure errors of the new mirrors (0.6 nm) are considerably smaller than those obtained previously, while mid-spatial frequency roughness still needs improvement. This roughness reduces mostly the throughput of the system; i. e. most of the scattered light occurs outside the field of the camera and there is only a small reduction of contrast or resolution.

Physical Description

13 p.

Notes

OSTI as DE98057751

Other: FDE: PDF; PL:

Source

  • 23. SPIE annual international symposium on microlithography conference, Santa Clara, CA (United States), 22-27 Feb 1998

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  • Other: DE98057751
  • Report No.: UCRL-JC--128291
  • Report No.: CONF-980225--
  • Grant Number: W-7405-ENG-48
  • Office of Scientific & Technical Information Report Number: 665633
  • Archival Resource Key: ark:/67531/metadc711364

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  • February 19, 1998

Added to The UNT Digital Library

  • Sept. 12, 2015, 6:31 a.m.

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  • April 10, 2017, 1:29 p.m.

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Spiller, E.; Weber, F. J.; Montcalm, C.; Baker, S. L.; Gullikson, E. M. & Underwood, J. H. Multilayer coating and tests of a 10x extreme ultraviolet lithographc camera, article, February 19, 1998; California. (digital.library.unt.edu/ark:/67531/metadc711364/: accessed September 20, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.