Torsional Ratcheting Actuating System

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Description

A new type of surface micromachined ratcheting actuation system has been developed at the Microelectronics Development Laboratory at Sandia National Laboratories. The actuator uses a torsional electrostatic comb drive that is coupled to an external ring gear through a ratcheting scheme. The actuator can be operated with a single square wave, has minimal rubbing surfaces, maximizes comb finger density, and can be used for open-loop position control. The prototypes function as intended with a minimum demonstrated operating voltage of 18V. The equations of motion are developed for the torsional electrostatic comb drive. The resonant frequency, voltage vs. displacement and force ... continued below

Physical Description

4 p.

Creation Information

BARNES,STEPHEN MATTHEW; MILLER,SAMUEL L.; RODGERS,M. STEVEN & BITSIE,FERNANDO January 24, 2000.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM, and Livermore, CA (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

A new type of surface micromachined ratcheting actuation system has been developed at the Microelectronics Development Laboratory at Sandia National Laboratories. The actuator uses a torsional electrostatic comb drive that is coupled to an external ring gear through a ratcheting scheme. The actuator can be operated with a single square wave, has minimal rubbing surfaces, maximizes comb finger density, and can be used for open-loop position control. The prototypes function as intended with a minimum demonstrated operating voltage of 18V. The equations of motion are developed for the torsional electrostatic comb drive. The resonant frequency, voltage vs. displacement and force delivery characteristics are predicted and compared with the fabricated device's performance.

Physical Description

4 p.

Notes

OSTI as DE00750341

Medium: P; Size: 4 pages

Source

  • Modeling and Simulation of Microsystems 2000, San Diego, CA (US), 03/27/2000--03/29/2000

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  • Report No.: SAND2000-0203C
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 750341
  • Archival Resource Key: ark:/67531/metadc711287

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

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Creation Date

  • January 24, 2000

Added to The UNT Digital Library

  • Sept. 12, 2015, 6:31 a.m.

Description Last Updated

  • April 10, 2017, 8:31 p.m.

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BARNES,STEPHEN MATTHEW; MILLER,SAMUEL L.; RODGERS,M. STEVEN & BITSIE,FERNANDO. Torsional Ratcheting Actuating System, article, January 24, 2000; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc711287/: accessed December 11, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.