Pulsed-Laser Deposition of Electronic Oxides: Superconductor and Semiconductor Applications

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Over the past decade, pulsed-laser deposition (PLD) has proven to be one of the most versatile and effective methods for obtaining high-quality electronic oxide thin-film materials. Much of this success can be attributed to its initial use in depositing high temperature superconducting materials. However, pulsed-laser deposition is now a leading research tool in the development of various electronic oxide thin-film technologies, In this paper, recent progress in the deposition of oxide materials on dissimilar materials for both superconductor and semiconductor applications is discussed. Recent developments in the synthesis of superconducting wires via epitaxial growth of superconducting oxides on biaxially textured ... continued below

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Norton, D. P.; Park, C.; Lee, Y. E.; Budai, J. D.; Chisholm, M. F.; Verebelyi, D. T. et al. January 24, 2000.

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Over the past decade, pulsed-laser deposition (PLD) has proven to be one of the most versatile and effective methods for obtaining high-quality electronic oxide thin-film materials. Much of this success can be attributed to its initial use in depositing high temperature superconducting materials. However, pulsed-laser deposition is now a leading research tool in the development of various electronic oxide thin-film technologies, In this paper, recent progress in the deposition of oxide materials on dissimilar materials for both superconductor and semiconductor applications is discussed. Recent developments in the synthesis of superconducting wires via epitaxial growth of superconducting oxides on biaxially textured metal tapes is described. In addition, efforts to integrate high-k dielectric oxides on semiconductor surfaces using pulsed-laser deposition are highlighted.

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OSTI as DE00751428

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  • SPIE Vol. 3933 Conference4 on Laser Applications in Microelectronic and Optoelectronic Manufacturing V, San Jose, CA (US), 01/24/2000--01/26/2000

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  • Report No.: ORNL/CP-105775
  • Grant Number: AC05-96OR22464
  • Office of Scientific & Technical Information Report Number: 751428
  • Archival Resource Key: ark:/67531/metadc710928

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  • January 24, 2000

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  • Sept. 12, 2015, 6:31 a.m.

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  • Jan. 20, 2016, 3:27 p.m.

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Norton, D. P.; Park, C.; Lee, Y. E.; Budai, J. D.; Chisholm, M. F.; Verebelyi, D. T. et al. Pulsed-Laser Deposition of Electronic Oxides: Superconductor and Semiconductor Applications, article, January 24, 2000; Tennessee. (digital.library.unt.edu/ark:/67531/metadc710928/: accessed June 22, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.