Plasma synthesis of high temperature ceramic films

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Description

Thin films of alumina, chromia, mullite, yttria and zirconia have been synthesized using a plasma-based method called metal plasma immersion ion implantation and deposition (Mepiiid)--a highly versatile plasma deposition technique with ion energy control. Monolithic films (a single ceramic component) and multilayer films (individual layers of different ceramic materials) were formed. The films were characterized for their composition and structure in a number of different ways, and the high temperature performance of the films was explored, particularly for their ability to maintain their integrity and adhesion when subjected to repetitive high temperature thermal cycling up 1100 C. We found that ... continued below

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35 p.

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Brown, I.G. & Monteiro, O.R. November 1, 1998.

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Description

Thin films of alumina, chromia, mullite, yttria and zirconia have been synthesized using a plasma-based method called metal plasma immersion ion implantation and deposition (Mepiiid)--a highly versatile plasma deposition technique with ion energy control. Monolithic films (a single ceramic component) and multilayer films (individual layers of different ceramic materials) were formed. The films were characterized for their composition and structure in a number of different ways, and the high temperature performance of the films was explored, particularly for their ability to maintain their integrity and adhesion when subjected to repetitive high temperature thermal cycling up 1100 C. We found that the films retain their adhesion and quality without any apparent degradation with time, even after a large number of cycles; (the tests were extended out to a total of 40 cycles each of 24 hours duration). After repetitive high temperature thermal cycling, the film-substrate adhesion was greater than {approx}70 Mpa, the instrumental limit of measurement, and the interface toughness was approximately 0.8 MPa m{sup 1/2}.

Physical Description

35 p.

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OSTI as DE00006531

Medium: P; Size: 35 pages

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  • Other Information: Supercedes report DE00006531; PBD: 1 Nov 1998

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  • Report No.: LBNL--42492
  • Grant Number: AC03-76SF00098
  • DOI: 10.2172/6531 | External Link
  • Office of Scientific & Technical Information Report Number: 6531
  • Archival Resource Key: ark:/67531/metadc710597

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Office of Scientific & Technical Information Technical Reports

Reports, articles and other documents harvested from the Office of Scientific and Technical Information.

Office of Scientific and Technical Information (OSTI) is the Department of Energy (DOE) office that collects, preserves, and disseminates DOE-sponsored research and development (R&D) results that are the outcomes of R&D projects or other funded activities at DOE labs and facilities nationwide and grantees at universities and other institutions.

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  • November 1, 1998

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  • Sept. 12, 2015, 6:31 a.m.

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  • April 12, 2017, 1:47 p.m.

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Brown, I.G. & Monteiro, O.R. Plasma synthesis of high temperature ceramic films, report, November 1, 1998; California. (digital.library.unt.edu/ark:/67531/metadc710597/: accessed April 27, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.