MECHANICAL TESTING OF EPON SU-8 WITH SIEM

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High aspect ratio structures are often present in MEMS devices and EPON SU-8 is often used to produce such structures because of its low cost. It is essential to know the mechanical properties of SU-8 for producing reliable MEMS products. However, the mechanical properties of SU-8 may depend on the manufacturing process and the size of the structure, which is in the micron domain. Hence, one needs to test specimens that are similar in size to MEMS structures to determine if the mechanical properties change with processing protocol. In this work, the authors applied the newly developed technique SIEM (Speckle ... continued below

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4 pages

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CHANG,S.; WARREN,J. & CHIANG,F.P. June 8, 2000.

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Description

High aspect ratio structures are often present in MEMS devices and EPON SU-8 is often used to produce such structures because of its low cost. It is essential to know the mechanical properties of SU-8 for producing reliable MEMS products. However, the mechanical properties of SU-8 may depend on the manufacturing process and the size of the structure, which is in the micron domain. Hence, one needs to test specimens that are similar in size to MEMS structures to determine if the mechanical properties change with processing protocol. In this work, the authors applied the newly developed technique SIEM (Speckle Interferometry with Electron Microscopy) to the determination of SU-8's mechanical properties.

Physical Description

4 pages

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OSTI as DE00759049

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  • MICROSCALE SYSTEMS: MECHANICS AND MEASUREMENTS SYMPOSIUM, ORLANDO, FL (US), 06/08/2000--06/08/2000

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  • Report No.: BNL--67531
  • Report No.: KA0404
  • Grant Number: AC02-98CH10886
  • Office of Scientific & Technical Information Report Number: 759049
  • Archival Resource Key: ark:/67531/metadc710219

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  • June 8, 2000

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  • Sept. 12, 2015, 6:31 a.m.

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  • Nov. 9, 2015, 8:10 p.m.

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CHANG,S.; WARREN,J. & CHIANG,F.P. MECHANICAL TESTING OF EPON SU-8 WITH SIEM, article, June 8, 2000; Upton, New York. (digital.library.unt.edu/ark:/67531/metadc710219/: accessed November 17, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.