Improvements in bis(cyclopentadienyl)magnesium purity as determined with gas chromatography-mass spectroscopy

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Bis(cyclopentadienyl)magnesium (MgCp2) is used commonly as a source for doping nitride materials with magnesium. Increased oxygen incorporation known to accompany the use of MgCp2 makes the purity of this precursor an important consideration in nitride CVD. Gas chromatography-mass spectroscopy (GCMS) methods have now been developed for the identification of volatile impurities in MgCp2. Diethylether, an oxygen containing organic compound (CH{sub 3}CH{sub 2}OCH{sub 2}CH{sub 3}), and additional organic impurities were found in the MgCp2 supplied by three manufacturers. Subsequent refinements in the synthetic processes by these companies have resulted in the availability of MgCp2 free of ether and other organic impurities ... continued below

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13 p.

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BARTRAM,MICHAEL E. March 8, 2000.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM, and Livermore, CA (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

Bis(cyclopentadienyl)magnesium (MgCp2) is used commonly as a source for doping nitride materials with magnesium. Increased oxygen incorporation known to accompany the use of MgCp2 makes the purity of this precursor an important consideration in nitride CVD. Gas chromatography-mass spectroscopy (GCMS) methods have now been developed for the identification of volatile impurities in MgCp2. Diethylether, an oxygen containing organic compound (CH{sub 3}CH{sub 2}OCH{sub 2}CH{sub 3}), and additional organic impurities were found in the MgCp2 supplied by three manufacturers. Subsequent refinements in the synthetic processes by these companies have resulted in the availability of MgCp2 free of ether and other organic impurities as determined by GCMS.

Physical Description

13 p.

Notes

OSTI as DE00752086

Medium: P; Size: 13 pages

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  • Journal Name: Materials Internet Journal of Nitride Semiconductor Research; Other Information: Submitted to Materials Internet Journal of Nitride Semiconductor Research

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  • Report No.: SAND2000-0611J
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 752086
  • Archival Resource Key: ark:/67531/metadc710116

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  • March 8, 2000

Added to The UNT Digital Library

  • Sept. 12, 2015, 6:31 a.m.

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  • April 7, 2017, 1:14 p.m.

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BARTRAM,MICHAEL E. Improvements in bis(cyclopentadienyl)magnesium purity as determined with gas chromatography-mass spectroscopy, article, March 8, 2000; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc710116/: accessed September 26, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.