Optical and tribological properties of diamond-like carbon films synthesized by plasma immersion ion processing

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Hard diamond-like carbon (DLC) films have been prepared on PMMA (Polymethyl methacrylate), glass, and Si(100) substrates using C{sub 2}H{sub 2}-Ar plasma immersion ion processing (PIIP). The composition, structure, and properties of the films were investigated with regard to variation of the deposition parameters. It was found that the modulation of reactive gas composition during PIIP could enhance the formation of DLC films with an increased sp{sup 3} bonding structure, improved surface smoothness, high density and high hardness. An optimal combination of good optical properties and high hardness was highly dependent on the control of hydrogen content in the DLC films. ... continued below

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20 p.

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He, X-M.; Walter, K.C.; Bardeau, J-F.; Nastasi, M.; Lee, S-T. & Sun, X.S. April 12, 1999.

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  • Los Alamos National Laboratory
    Publisher Info: Los Alamos National Lab., Los Alamos, NM (United States)
    Place of Publication: Los Alamos, New Mexico

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Description

Hard diamond-like carbon (DLC) films have been prepared on PMMA (Polymethyl methacrylate), glass, and Si(100) substrates using C{sub 2}H{sub 2}-Ar plasma immersion ion processing (PIIP). The composition, structure, and properties of the films were investigated with regard to variation of the deposition parameters. It was found that the modulation of reactive gas composition during PIIP could enhance the formation of DLC films with an increased sp{sup 3} bonding structure, improved surface smoothness, high density and high hardness. An optimal combination of good optical properties and high hardness was highly dependent on the control of hydrogen content in the DLC films. Tribological tests showed that DLC-coated glass and PMMA samples exhibited a reduced friction coefficient and enhanced wear resistance relative to uncoated glass and PMMA materials. The effects of ion energy and gas composition during PIIP deposition on the formation of optically transparent and wear resistant DLC films are discussed.

Physical Description

20 p.

Notes

OSTI as DE00756933

Medium: P; Size: 20 pages

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  • 26TH International Conference of Metallurgical Coatings and Thin Films, San Diego, CA (US), 04/12/1999--04/16/1999

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  • Report No.: LA-UR-99-812
  • Grant Number: W-7405-ENG-36
  • Office of Scientific & Technical Information Report Number: 756933
  • Archival Resource Key: ark:/67531/metadc710009

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  • April 12, 1999

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  • Sept. 12, 2015, 6:31 a.m.

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  • April 7, 2017, 7:16 p.m.

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He, X-M.; Walter, K.C.; Bardeau, J-F.; Nastasi, M.; Lee, S-T. & Sun, X.S. Optical and tribological properties of diamond-like carbon films synthesized by plasma immersion ion processing, article, April 12, 1999; Los Alamos, New Mexico. (digital.library.unt.edu/ark:/67531/metadc710009/: accessed October 18, 2018), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.