The Role of Interfacial Properties on MEMS Performance and Reliability

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Description

We have constructed a humidity-controlled chamber in which deflections of polysilicon cantilever beams are observed by interferometry, resulting in in-situ adhesion measurements within a fracture mechanics framework. From adhesion energy measurements for uncoated hydrophilic beams, we demonstrate an exponential dependence of adhesion on relative humidity (RH). We can explain this trend with a single-asperity model for capillary condensation. For coated hydrophobic beams, adhesion is independent of RH up to a threshold value which depends on the coating used. However, we have found that exposure to very high RH ({ge}90%) ambients can cause a dramatic increase in adhesion, surprisingly with a ... continued below

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14 p.

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de Boer, M.P.; Knapp, J.A.; Mayer, T.M. & Michalske, T.A. May 21, 1999.

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This article is part of the collection entitled: Office of Scientific & Technical Information Technical Reports and was provided by UNT Libraries Government Documents Department to Digital Library, a digital repository hosted by the UNT Libraries. More information about this article can be viewed below.

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  • Sandia National Laboratories
    Publisher Info: Sandia National Labs., Albuquerque, NM, and Livermore, CA (United States)
    Place of Publication: Albuquerque, New Mexico

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Description

We have constructed a humidity-controlled chamber in which deflections of polysilicon cantilever beams are observed by interferometry, resulting in in-situ adhesion measurements within a fracture mechanics framework. From adhesion energy measurements for uncoated hydrophilic beams, we demonstrate an exponential dependence of adhesion on relative humidity (RH). We can explain this trend with a single-asperity model for capillary condensation. For coated hydrophobic beams, adhesion is independent of RH up to a threshold value which depends on the coating used. However, we have found that exposure to very high RH ({ge}90%) ambients can cause a dramatic increase in adhesion, surprisingly with a stronger effect for perfluorodecyltrichlorosilane (FDTS, C{sub 10}H{sub 4}F{sub 17}SiCl{sub 3}) than octadecyltrichlorosilane (ODTS, C{sub 18}H{sub 37}SiCl{sub 3}). Newly developed computational mechanics to measure adhesion in the presence of an applied load allow us to explore how the adhesion increase develops. We believe that water adsorption at silanol sites at the FDTS/substrate interface, possibly exacerbated by coupling agent migration, leads to water islanding and the subsequent adhesion increase at very high RH levels.

Physical Description

14 p.

Notes

OSTI as DE00007264

Medium: P; Size: 14 pages

Source

  • EOS/SPIE Conference on Microsystems Metrology and Inspection, Munich (DE), 06/14/1999--06/18/1999

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  • Report No.: SAND99-1294C
  • Grant Number: AC04-94AL85000
  • Office of Scientific & Technical Information Report Number: 7264
  • Archival Resource Key: ark:/67531/metadc709165

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  • May 21, 1999

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  • Sept. 12, 2015, 6:31 a.m.

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  • April 7, 2017, 2:41 p.m.

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de Boer, M.P.; Knapp, J.A.; Mayer, T.M. & Michalske, T.A. The Role of Interfacial Properties on MEMS Performance and Reliability, article, May 21, 1999; Albuquerque, New Mexico. (digital.library.unt.edu/ark:/67531/metadc709165/: accessed September 20, 2017), University of North Texas Libraries, Digital Library, digital.library.unt.edu; crediting UNT Libraries Government Documents Department.